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Permissible surrounding magnetic field
Maximum irradiated thermal output
Maximum permissible rotor temperature of the turbo-
pump
Maximum permissible bakeout temperature at the
high vacuum flange
Tbl. 2:
2.5 Proper use
► Use the turbopump only for generating vacuum.
► Use the turbopump only in combination with a suitable backing pump that can deliver up to the
► Use the turbopump only in closed indoor areas.
► Use the turbopump only for the evacuation of dry and inert gases.
2.6 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use; in particular:
● Establishing the voltage supply without correct installation
● Installing with non-specified fastening material
● Pumping explosive media
● Pumping of corrosive media
● Pumping of condensing vapors
● Pumping of fluids
● Pumping of dust
● Operating with impermissible high gas throughput
● Operating with impermissible high fore-vacuum pressure
● Operation with excessive irradiated heat output
● Operating in impermissible high magnetic fields
● Operating in an incorrect gas mode
● Venting with impermissible high venting rates
● Using for pressure generation
● Using in areas with ionizing radiation
● Operating in potentially explosive areas
● Using in systems in which sporadic loads and vibrations or periodic forces act on the device
● Causing of hazardous operating conditions by a presetting on the electronic drive unit that is con-
● Using of accessories or spare parts that are not listed in these instructions
2.7 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Permissible ambient conditions
Notes on ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible backing pressure or at maximum gas throughput, depending on the
cooling type. The turbopump is intrinsically safe thanks to redundant temperature monitor-
ing.
● The reduction in backing pressure or gas throughput permits operation of the turbo-
pump at higher ambient temperatures.
● If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit first reduces the drive output and then switches it off where neces-
sary.
required maximum fore-vacuum pressure.
trary to the process
3 mT
0.9 W
90 ℃
120 ℃
Safety
15/54
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