VAT 651 Series Installation, Operating, & Maintenance Instructions page 80

15. Unfasten all 3 actuator screws and
remove actuator.
16. Remove actuator shaft seals carefully
with soft tool.
17. Clean the actuator feed through and
grooves.
18. Lubricate each o-ring groove with 0.1
ml vacuum grease. Pay attention that
grease is distributed constantly over
the whole circumference.
19. Clean or replace seals if necessary.
20. Lubricate each o-ring with 0.05 ml
vacuum grease.
21. Install o-rings.
22. Deposit 0.1 ml vacuum grease on
each o-ring. Pay attention that
grease is distributed constantly over
the whole circumference.
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MAINTENANCE
Description
Edition 2014-07-10
Series 651
Required tool
Allen wrench 5 mm
O-ring removal tool
•
Clean room wiper
•
Isopropyl alcohol
Vacuum grease
Vacuum grease
605451EC