Table of Contents
Advertisement
measurement of the base pressure of the process chamber (for leak detection and
base vacuum analysis) with a high conductance port and two orifices for process
pressures. Various inlet systems are described with their typical use in
4.5 Sample Inlet Systems and Examples of Use
4.5.1 Inlet System
When both volume and high vacuum pump speed are constant, the orifice hole size
determines the pressure at the sensor. Orifices are available in various sizes to
cover several pressure ranges.
pressure range application.
will assist in choosing the proper orifice for the application.
Table 4-4 Orifices, sniffers and capillaries (Typically process pressure)
Figure 4-4
Size of Orifices, Sniffers and Capillaries
10 mTorr orifice
15 mTorr orifice
100 mTorr orifice
360 mTorr orifice
1 Torr orifice
3 Torr orifice
10 Torr orifice
30 Torr orifice
(requires high pressure by-pass)
1.5 M capillary
3 M capillary
Transpector SPS Operating Manual
Table 4-4
show different orifices for low and high
shows pressure ranges for sampling which
section
4.5.
Part Number
964-706-G6
964-706-G8
964-706-G5
964-706-G7
964-706-G4
964-706-G9
964-706-G3
964-706-G10
964-233-G1
964-233-G3
4 – 8
Advertisement
Table of Contents
Need help?
Do you have a question about the Transpector SPS and is the answer not in the manual?