Fuse Rating; Overvoltage Category; Electrical Connections; Nitrogen Purge Gas (Corrosive System Only) - Inficon Transpector SPS Operating Manual

1.7.1.4 Fuse Rating

 3.15 A @ 250 V
 Interrupt Current 35 A @ 250 V
 Type T (5 x 20 mm)

1.7.1.5 Overvoltage Category

Overvoltage Category II (per EN61010-1:2010)
 Short Term: 1440 V < 2 seconds
 Long Term: 490 V < 5 seconds

1.7.1.6 Electrical Connections

One of the following:
 110 V
 230 V
NOTE: Do not replace power cord with an inadequately rated cord. Cord must be

1.8 Nitrogen Purge Gas (Corrosive System Only)

The corrosive service turbo molecular pump requires 10 to 25 sccm nitrogen purge
gas flow through its bearings to protect the bearings from corrosion and loss of
lubricant by evaporation. The Transpector SPS nitrogen regulator range is
10–15 psi (gauge). It is set for 10 sccm flow at the factory.
Normally, dry nitrogen is supplied at the acceptable pressure range for the air
pressure. (See
supplied directly to the solenoid valve block and to the pressure regulator via the
supplied 6.35 mm (1/4 in.) tee. The regulator supplies dry nitrogen at a reduced
pressure for the purge.
~
~
, three-pronged, grounded plug
~
, European style, two-pronged plug with ground contact
rated 10 A or higher.
CAUTION
The corrosive service turbo molecular pump (CVD/Etch),
requires nitrogen purge gas flow whenever the system is
operational.
section 1.10.1 on page
Transpector SPS Operating Manual
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1-10). In this manner, dry nitrogen can be
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