Foreline Subsystem; Heater Subsystem; Sps Controller Subsystem - Inficon Transpector SPS Operating Manual

4.3.2.1 Foreline Subsystem

The foreline subsystem components include a flexible foreline hose of various
lengths (
The foreline pump produces base pressures (no gas flow) of 2 Torr, significantly
less than the 10 Torr needed for the turbo molecular pump operation. The 2 Torr
operating pressure for the foreline is in the viscous gas flow regime such that the
foreline does not require a large diameter. The inside diameter of the foreline is
6 mm (1/4 in.) which produces a 2 Torr pressure drop across a 10 m length of
foreline at 20 sccm of gas flow.
The foreline Pirani gauge can be used to troubleshoot pumping system problems
and to verify that the turbo pump is being backed properly.

4.3.3 Heater Subsystem

The heater is a dual temperature (150°C and 90°C), dual element silicone rubber
pad heater with silicone rubber foam insulation.
The Controller supplies power to the heater.
The heater is software controlled at low temperature (90°C) or high temperature
(150°C).
4.3.4 Transpector SPS Controller Subsystem
The controller contains all of the AC components, the AC-DC converter which
supplies the +24 V (dc) for the Transpector, the foreline pump, the turbo molecular
pump controller, and valve solenoids.
The AC-DC converter accepts input voltages ranging 90-240V (ac). The output is
24 V (dc) @ 12A. The output is supplied through the controller interface cable to
the Transpector electronics.
The heater drive circuit controls the AC voltage to the heaters. The heaters are
interlocked and will not turn on if the pump is not up to speed or if there are any
faults.
4 – 5

10 m), a foreline Pirani gauge, and a diaphragm foreline pump.
WARNING - High Temperature
During or immediately after bakeout, the heating jacket
and metal surfaces in the vicinity of the heating jacket are
hot. These surfaces exceed 100°C at the maximum
ambient operating temperature (50°C), and will cause
burns if touched.
Transpector SPS Operating Manual