Edwards iXL120N Instruction Manual page 3

Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble
the technical file, that the product(s)
where w is 1,2,3 or 4 depending on the application
where x = 0,1,2,3,4,5,6 or 7 depending on the Tool Interface type supplied
where y = 0,1,2,3 or 5 depending on the type of water fittings supplied
where z = 0 if no additional accessories are supplied and 1 if a cooling water constant flow valve
is fitted.
And their accessories:
Disconnect Box 200-460 V 50-60 Hz
EMS button
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN1012-2:1997
EN61010-1: 2001
EN 61326-1: 2006
ANSI/UL61010-1:2004
+ Rev 2008
SEMI S2-0709
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
2002/95/EC* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates
only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this
statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply
to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.
Note: This declaration covers all product serial numbers from the date this Declaration was signed
onwards.
Sia Abbaszadeh, Chief Technical Officer
This product has been manufactured under a quality system registered to ISO9001
iXL120 A5411wxyz
A50806000
D37491500
Compressors and Vacuum Pumps Safety Requirements.
Part 2 - Vacuum Pumps.
Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. Part 1 General Requirements.
Electrical Equipment for Measurement, Control and Laboratory Use
- EMC Requirements. (Industrial Location Immunity – Class A Emissions)
Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use – Part 1: General Requirements.
Environmental, Health and Safety Guideline for Semiconductor
Manufacturing Equipment.
19.08.2010 Shoreham
Date and Place