Ulvac MS120A Instruction Manual page 60

The output power is out of
order due to the open-
phase of the power supply
wiring.
Indication Alarm Name
oL2
Inverter overload
（oL2）
Cause
Pump overload
Blockage in exhaust piping
Not to reach the steady
rotation speed.
The output power is out of
order due to the open-phase
of the power supply wiring.
Poor warm-up operation
Indication
oPr
Keypad connection
（oPr）
Cause
The wiring between the inverter
and the controller has been
broken.
Check the power wiring.
Measures
Unable to rotate due to foreign matters.
Contact to ULVAC service center.
➡
Increased back pressure.
➡ Clean and wash the piping on the exhaust side of the
pump.
Damage to bearing.
Contact to ULVAC service center.
➡
High intake pressure
➡ Check the piping on the inlet side (for leakage etc.).
Clean and wash the piping on the exhaust side of the
pump.
The load at startup is high.
➡ At startup of this machine, apply loads after reaching
the steady rotation speed.
Check the power wiring.
Loads are applied without warming up.
➡ Warm up for approx. 30 minutes after startup.
Alarm Name
failure
Measures
Contact to ULVAC service center.
Status
The inverter overload protection is activated.
Status
The cable between the inverter and the controller has
been broken.
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YO20-0938-DI-001-00
3.6.1
Reference
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3.5.1
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3.5.1
3.5.1
4.1
3.6.1
Reference
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