Ulvac MS120A Instruction Manual page 49

Use water with fewer impurities for cooling water
It is recommended to use water with fewer impurities (e.g. industrial water; refer
to the table below) for cooling water of this machine.
In the cooling water system of this machine, water scale, such as calcium
carbonate, settles on depending on the water quality, which may reduce the
cooling water flow rate.
In addition, chlorine ions corrode the inner walls, which may cause leakage of
cooling water. Furthermore, when pure water is used, metal is separated
NOTES
therefrom, which may cause leakage of cooling water.
Note that in advance that in such a case, the repair cost may be borne by you.
[Reference] The standard quality of water supply in the Japanese industrial water works
Turbidity
20mg / L
or less
Established by: Japan Industrial Water Association (Industrial water quality standard
Pay attention to a decrease in amount of cooling water
NOTES
If the amount of cooling water is reduced, it may cause failures such as rapid
wear or seizing up of the components of the pump. Take care that this is highly
likely to occur especially when intake pressure is high,
Use with the exterior panel attached.
NOTES
Operating with the exterior panel removed may lower the performance. Be sure
to use with the exterior panel attached. Pumping performance may not be fully
provided under the condition immediately after the startup and with the panel
removed.
NOTES
Warm up for approx. 30 minutes (recommended) after startup
In order to make full use of the pump performance of this machine, it is
recommended to warm up for approx. 30 minutes after startup.
Avoid any operations that place a heavy load when starting the pump.
NOTES
If it takes longer to reach the steady rotation speed from the start, the inverter
protection circuit works to stop as an alarm. Apply loads after reaching the
steady rotation speed.
Suction of chemicals such as acid
NOTES
The pumping of chemicals, such as acid, may damage the pump and becomes
unable to operate. When the pump is not actively discharged from the inside
residual chemical product. (Refer to 3.5.4 Purge Gas and 3.5.5 Drain.)
pH Alkalinity Hardness
120mg/L
75mg/L
6.5~8.0
or less
or less
committee)
35
Total
Chloride
residue on Iron
ion
evaporation
250mg／L
80mg/L 0.3mg/L
or less or less
or less
YO20-0938-DI-001-00
Mangane
se
0.2mg/L
or less