Ulvac MS120A Instruction Manual page 13

How to operate monitor display ...................................................................................... 38
4.4.1
Parameter List ................................................................................................................................... 39
4.5
U3: Alarm history ................................................................................................................. 39
4.5.1
U4: Operation monitor ........................................................................................................40
4.5.2
5. Maintenance and Inspection ............................................................................ 41
Daily Inspection ................................................................................................................................. 41
5.1
Inspection after Long-Term Storage ........................................................................................... 41
5.2
Overhaul ..............................................................................................................................................42
5.3
Notes on Transportation .................................................................................................................42
5.4
6. Troubleshooting ....................................................................................................43
6.1 Trouble with Basic Operation........................................................................................................43
Alarm Status and Measures......................................................................................................... 44
6.2
How to restart the pump after an alarm .....................................................................................49
6.3
7. Specifications ........................................................................................................ 50
Performance Specifications .......................................................................................................... 50
7.1
External Dimensions ....................................................................................................................... 51
7.2
Appendix ......................................................................................................................... 52
Major Replacement Parts .......................................................................................................................... 52
TOC-３
YO20-0938-DI-001-00