Ulvac MS120A Instruction Manual page 12

Performance Curve ............................................................................................................................ 9
2.3
2.3.1 Pumping speed .......................................................................................................................... 9
2.3.2 Power consumption.................................................................................................................. 9
Name and Function of Parts ....................................................................................................... 10
2.4
Description of Controller ............................................................................................................... 11
2.5
System Configuration ...................................................................................................................... 14
2.6
3. Installation .............................................................................................................. 15
Before Installation ............................................................................................................................. 15
3.1
Responsibility for Work from Shipping to Startup ...................................................... 15
3.1.1
Storage environment requirements ............................................................................... 16
3.1.2
Environmental requirements for installation and operation .................................... 16
3.1.3
Unpacking ........................................................................................................................................... 17
3.2
Precautions for unpacking ................................................................................................ 17
3.2.1
Confirmation after unpacking ........................................................................................... 17
3.2.2
Transfer................................................................................................................................................ 18
3.3
How to hoist using crane ................................................................................................... 19
3.3.1
How to transport using pallet truck................................................................................. 20
3.3.2
Installation ........................................................................................................................................... 21
3.4
Leveling................................................................................................................................... 21
3.4.1
Earthquake countermeasures ......................................................................................... 21
3.4.2
Piping and Wiring ............................................................................................................................. 23
3.5
Inlet/Exhaust Port Piping ................................................................................................... 23
3.5.1
Dedicated silencer (Separately packed) ......................................................................24
3.5.2
Cooling water piping ........................................................................................................... 25
3.5.3
Purge Gas .............................................................................................................................. 27
3.5.4
Drain ........................................................................................................................................ 28
3.5.5
Electric Wiring .................................................................................................................................... 29
3.6
Electric wiring ........................................................................................................................ 29
3.6.1
Wiring for remote control ................................................................................................... 31
3.6.2
4. Operation ................................................................................................................34
Precautions on operation ...............................................................................................................34
4.1
Preparation for Operation .............................................................................................................. 36
4.2
Pre-Operation Check .......................................................................................................... 36
4.2.1
How to switch between LOCAL (manual) and REMOTE (remote) ...................... 36
4.2.2
How to Start/Stop ............................................................................................................................. 37
4.3
LOCAL operation ................................................................................................................. 37
4.3.1
REMOTE operation ............................................................................................................. 37
4.3.2
Monitor Display ............................................................................................................................... 38
4.4
TOC-２
YO20-0938-DI-001-00