Ulvac MS120A Instruction Manual page 59

Indication Alarm Name
LF2
Output current imbalance
（LF2）
Cause
Motor failure
Inverter failure
Indication Alarm Name
oC
Overcurrent
（oC）
Cause
Motor failure
Pump overload
Inverter failure
Indication Alarm Name
oL1
Motor overload
（oL1）
Cause
Pump overload
Motor failure
Measures
Contact to ULVAC service center.
Contact to ULVAC service center.
Measures
Contact to ULVAC service center.
Unable to rotate due to foreign matters.
Contact to ULVAC service center.
➡
Increased back pressure.
➡ Clean and wash the piping on the exhaust side of the
pump.
Damage to bearing.
Contact to ULVAC service center.
➡
High intake pressure
➡ Check the piping on the inlet side (for leakage etc.).
Contact to ULVAC service center.
Measures
Unable to rotate due to foreign matters.
➡ Contact to ULVAC service center.
Increased back pressure.
➡ Clean and wash the piping on the exhaust side of the
pump.
High intake pressure
➡ Check the piping on the inlet side (for leakage etc.).
Contact to ULVAC service center.
45
Status
The three-phase balance of the output current is
lost.
Status
Overcurrent flowed through the motor.
Status
The motor overload protection is activated.
YO20-0938-DI-001-00
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