Ulvac MS120A Instruction Manual page 40

● Install a flowmeter (e.g. flow sight) at the cooling water source
Install a flow meter (e.g. flow sight), which allows you to visually recognize the flow, at the cooling water
supply source, such as a device, to check whether or not cooling water flows.
● When using multiple units of this type, connect the cooling water pipes in parallel.
When using multiple units of this type, connect the cooling water pipes in parallel. A series connection
is insufficient in cooling capacity, which may cause a failure.
● Water with a lot of impurities is filtered using a filter or by other means.
When using water with a large amount of impurities, such as scale and iron, filter them with a filter
installed in the prior stage before use.
● Secure the required flow rate
If operation is continued with the cooling water flow rate below the specified amount, this machine may
break down. Secure at least the specified flow rate. In addition, if the supply source and drain port are
far apart from each other or if there is a height difference in the piping (lifting drainage to a position
higher than this machine), a sufficient flow rate may not be secured. In that case, secure the flow rate
by changing the piping layout, making the piping thicker, or increasing the supply pressure within the
specified range.
● Use the piping with an appropriate resistant water pressure and heatproof temperature.
For the cooling water system, use joints and pipes with a resistant water pressure of 0.9 MPa or more
and a heatproof temperature of 70℃ or more.
● Do not use metal pipes other than SUS pipes in the cooling water system (including the
equipment side)
Do not use metal pipes other than SUS pipes in the cooling water system including in the equipment
side. For example, when using metal pipes containing copper or zinc, ions may dissolve in water. The
dissolved ions may precipitate and adhere to the inner wall of pipes, reducing the flow rate of the
cooling water.
The cooling water piping used in this machine uses SUS pipes and PTFE tubes. Note in advance that
repairs are charged for trouble caused by a blockage in a pipe due to precipitation or accumulation of
impurities (scale, microorganisms, metal powder or metal ions) and deterioration of cooling efficiency.
■ Specifications of connection
Connection port: Rc3/8 female
■ Applicable piping
Joints and pipes with a resistant water pressure of 0.9MPa or more
Heatproof temperature: 70°C or more
Table 7: Piping specifications
Supply pressure (MPa)
Differential pressure between
inlet and outlet (MPa)
Cooling water
Flow rate (L/min)
Feed water temperature (°C)
0.1 ～ 0.3
0.1
MS120A：＞4.0
10 ～ 30 (non-condensing)
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YO20-0938-DI-001-00