Ulvac MS120A Instruction Manual page 27

Dry vacuum pump
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Transition of data display
Power ON
(Rotation speed
(Normal rotation)
(Frequency command display)
(Parameter setting mode)
(Monitor display)
(Output power display)
(Output current display)
Figure 6: Transition diagram of data display
display)
13
Description of key operation
"XX"と示されているところは、本機それぞれ
The display areas with "XX" show the
の実際の状態を表示します。
respective actual status of this machine.
YO20-0938-DI-001-00

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