Ulvac MBS-053 Manuals

Ulvac MBS-053 Manuals

Manuals and User Guides for Ulvac MBS-053. We have 1 Ulvac MBS-053 manual available for free PDF download: Instruction Manual

Ulvac MBS-053 Instruction Manual

Ulvac MBS-053 Instruction Manual (37 pages)

Mechanical Booster Vacuum Pump

Brand: Ulvac | Category: Water Pump | Size: 0.61 MB

Table of Contents

Table of Contents
2
0．Introduction
5
Before Using the MBS-053/MBS-053-01
5
Safety Symbols
7
Cautions for Safety
9
1 ．For Safe Operation

11
- Hazards Peculiar to the Pump and Safety Measures
  11
- Danger
  11
  - Leakage of Hazardous Gases and Substances
    11
- Warning Electric Shock
  12
- Caution High Temperature
  12
- Warning Explosion
  14
- Safety Data Sheet (SDS)
  14
2 ．Specification Table

15
3 ． Design of Vacuum Pumping System

17
- Pumping System
  17
- Fig.3 Basic Piping Diagram to the Vacuum Chamber
  
  18
  - Fore Pump
    19
  - Ultimate Pressure
    19
  - Pumping Speed
    19
- Fig.4 Compression Ratio Property
  
  19
  - Fig.5 Pumping Speed Curve
    19
4 ．Installation

20
5 ．Operation

27
- Structure of Pump
  27
- Fig.13 Structure of Pump
  
  27
  - Cautions for Operation
    28
  - Start of Operation
    28
  - Stopping the Operation
    28
  - Protection Feature
    30
    
    External Control and Alarm Output
    31
- Fig.14 External Control Connector Pin Assignment
  
  31
- Fig.15 Alarm Signal Origination Side Circuitry
  
  31
6 ．Maintenance

32
- Daily Inspection
  32
- Long Interval Maintenance
  32
- Trouble Check List
  33
7 ．Support in Trouble

35
8 ．Disposal

35

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