Ulvac GHD-031A Instruction Manual page 42

8．Maintenance parts
8.1
Maintenance parts list
Product name
GHD-031
Maintenance kit A
GHD-031
Maintenance kit B
Note 1: For the relationship between components, see the disassembly drawing.
Table6. GHD-031 Maintenance parts list
No.
15 Outlet valve
16 Outlet valve spring
22 Check valve
24
Oval ring
25
Air open valve
26 Air open valve spring
36 O ring _S-12
37 O ring _S-56
38 O ring _S-60
O ring （Casing）
39
40
O ring _P-5
41
O ring _P-8
42 O ring _P-9
43 O ring _P-12.5
44 O ring _P-18
45 O ring _G-50
46
Oil seal _VC-10-20-4
47
Oil seal _SC-11-25-7
81
O ring _SS040
82 O ring _SS110
84 Air open route O ring
85 O ring _P-20
13 1st Vane
14 2st Vane
18 Oil pump vane
27 Oil level gauge
32
Inner coupling
－32－
Parts name
Q'ty
2
2
1
1
1
1
1
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
2
2
1
1
1