Ulvac GHD-031A Instruction Manual page 13

1.1.4
Caution
Cause
High temperatures caused burns.
Caution
Never place combustible materials around the motor or pump. There is a risk of fire.
Also, do not place objects which block ventilation around the motor. Abnormal heat
generation may result in burns or fire.
High temperature
Prevention method and measures
①The pump reaches a high temperature during
operation.
Pump main unit during non-load operation
Motor during non-load operation
Pump main unit during high-load operation
Motor during high-load operation
(High-load operation: Operation at a pressure
②Please be sure to protect and cool surface
of vacuum pump and away from human body. Use
this pump as built-in type.
③Since the surface temperature is hot,
touching the surface accidentally may result
in burns. Never touch the pump during
operation.
When carrying out inspection, wait for 10
minutes until the pump has cooled down
completely after it stops.
－3－
（Temperature increasing）
→30K
→35K
→35K
→40K
of 1kPa ～ 10kPa)