Ulvac GHD-031A Instruction Manual page 12

Warning
1.1.3
Cause
Pump inside pressure rises, and the
level gauge of the pump ejects.
Warning
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas. Otherwise,
the internal pump pressure increases causing the pump to explode, the oil level gauge
to protrude or the motor to be overloaded. This pump is not resistant to pressure.
The internal pump pressure is limited to 0.03 MPa (gauge pressure).
Explosion
Prevention method and measures
The maximum internal pump pressure is 0.03
MPa (gauge pressure).
Measure the pressure at the outlet side and,
if the pressure is 0.03 MPa or more (gauge
pressure); remove objects which block the
passage of gas from the outlet side. When an
oil mist trap is adopted, replace or clean
it so that it will not block the passage of
gas.
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