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Ulvac GHD-031A Instruction Manual page 39

Oil sealed rotary vacuum pump

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Problem
①The pump is too small for the
The pressure does
not decrease.
volume of the vacuum chamber.
②The pressure measurement
method is not correct.
③The vacuum gauge is not
suitable.
④The pipe connected to the inlet
port is small, or the piping
distance is long.
⑤The wire mesh at the inlet port is
clogged.
⑥The specified amount of oil has
not been added.
⑦The oil has deteriorated.
⑧Leakage occurs from the pipe
connected to the pump.
⑨Our specified oil is not being
used.
⑩ Oil does not circulate, or the
① Problem with power supply
Abnormal sound is
voltage.
generated.
②The motor malfunctions.
③Foreign matter has entered the
pump.
④The specified amount of oil has
not been added.
⑤The coupling malfunctions.
Cause
oil hole of the cover is clogged.
-29-
Measures
①Select another pump.
②Measure the pressure correctly.
③Measure with a calibrated
vacuum gauge suitable for the
pressure range.
④Use pipes having a diameter
larger than the inlet port
diameter, or reduce the distance
from the vacuum.
⑤Remove the piping from the
upper section of the inlet port,
and clean the wire mesh.
⑥Add the specified amount of
oil.
⑦Replace the oil.
⑧ Locate the leakage with a
leakage detector and stop the
leakage.
⑨Overhaul the pump and replace
with oil specified by us.
⑩Overhaul and clean the oil hole.
①Set the power supply voltage to
within ±10% of the rated
voltage.
②Replace the motor.
③Eliminate the foreign matter
and overhaul the pump.
④Add the specified amount of
oil.
⑤Overhaul (replace the
coupling).
Reference
5.2
5.1
5.1
5.1
6.2
6.3
6.3
--
6.3
6.2
3.5
6.2
6.2
6.3
6.2

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This manual is also suitable for:

Ghd-031b