Ulvac GR60 Instruction Manual

Multiple roots type dry pump ie3 motor adoption

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Instructions Manual
Multiple Roots Type Dry Pump
Be sure to read the manual before using this
product. In addition, keep it in a safe and readily
available place.
Components Division
http://www.ulvac.co.jp/
GR60
GR90
GR180
※IE3 motor adoption
ULVAC, INC.
YK09-0023-DI-003-02

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Summary of Contents for Ulvac GR60

  • Page 1 YK09-0023-DI-003-02 Instructions Manual Multiple Roots Type Dry Pump GR60 GR90 GR180 ※IE3 motor adoption Be sure to read the manual before using this product. In addition, keep it in a safe and readily available place. ULVAC, INC. Components Division http://www.ulvac.co.jp/...
  • Page 3: Before Use

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0. Before Use We are sincerely appreciate your decision to purchase our product. Upon receipt of the product, please confirm the contents included are the same as you ordered and check the product for any damage attributed to transportation etc.
  • Page 4: Safety Symbol Mark

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0.1 Safety Symbol Mark This instructions manual and the product warning labels indicate safety symbol marks for the understanding of compliance rules. The signs for the symbols are classified as follows.
  • Page 5: Safety Precautions

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0.3 Safety Precautions This section describes a way to avoid dangers and dangerous behavior to be avoided for each work. About this product and this instructions manual To use this product for many years, be sure to read this instructions...
  • Page 6 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Storage/Installation (1) This product is paced in a wooden crate. Please ask a professional contractor to dismantle it. During the work, there is the risk of cutting your hands by nails or wooden chips used to fix the wooden crate.
  • Page 7 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Intake and exhaust piping <Mounting> Before starting work, check that all dangerous energies are shut out. WARNING Nitrogen Gas Piping <Mounting> (1) Before starting work, check that all dangerous energies are shut out.
  • Page 8 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Power Cable <Mounting> (1) Before starting work, check that all dangerous energies are shut out. (2) Wiring work shall be performed only by qualified personnel. Wrong wiring work may trigger fire.
  • Page 9 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Stop For a while after the operation stops, do not touch the vacuum pump, motor, and pipes since they are subjected to high temperature. If your WARNING body comes into contact with them, you may get burned. Supply cooling water until the pump temperature becomes low.
  • Page 10 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Nitrogen Gas Piping <Removal> (1) Before removal of the nitrogen gas pipes, close the feed valve of nitrogen gas. (2) The pipe on the device side has residual pressure. Install a pressure...
  • Page 11: Type/Description And Position Of Warning Label On This Machine

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0.4 Type/Description and position of warning label on this machine On this machine, warning labels are attached to the points to warn. Be sure to check before operating the pump.
  • Page 12 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 GR60 GR90 GR180...
  • Page 13: Acceptance And Storage Of Pump

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0.5 Acceptance and storage of pump 0.5.1 Acceptance of unpacked pump (1) This product is paced in a wooden crate. Please ask a professional contractor to dismantle it. During the work, there is the risk of cutting your hands by nails or wooden chips used to fix the wooden crate.
  • Page 14: Transportation (Carry-In/Out)

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0.5.2 Transportation (Carry-in/out) (1) This product has casters. But do not transport it on casters over a long distance. (2) The mass of each product is as follows: GR60: 128kg...
  • Page 15: Ambient Conditions During Storage, Installation, And Operation

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0.5.3 Ambient conditions during storage, installation, and operation This product is a machine with precision clearances. Therefore satisfy the following conditions during the storage, installation, and operation. (1) Ambient [During :...
  • Page 16: Protective Equipment

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 0.6 Protective Equipment This machine is equipped with a three-phase AC motor. The motor does not have a protective equipment. When connecting the motor to the power supply, set it up via overload protective equipment according to the national and local safety laws and regulations at the site.
  • Page 17: Table Of Contents

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Table of Contents 0. Before Use ··························································································· i 0.1 Safety Symbol Mark ····························································································ii 0.2 Definition of Safety Symbol Mark ···········································································ii 0.3 Safety Precautions ·····························································································iii 0.4 Type/Description and position of warning label on this machine ···································ix 0.5 Acceptance and storage of pump ··········································································xi...
  • Page 18 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 6. Removal ······························································································ 27 6.1 Electric connection ·····························································································27 6.2 Cooling water pipe ······························································································27 6.3 Nitrogen gas pipe ·······························································································28 6.4 Intake and exhaust pipe ·······················································································28 7. Maintenance ························································································ 29 7.1 Inspection ·········································································································29 7.2 Operation after long-term storage ··········································································29...
  • Page 19: For Safe Use

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 1. For safe use 1.1 Product-specific Risk and Safety Measure 1.1.1 Intake and Exhaust of Hazardous Gas/Substance DANGER Factor How to avoid / Measure Exhaust of toxic gas, combustion gas, flammable gas, corrosive gas, and explosive gas is extremely dangerous.
  • Page 20: Warning

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 1.1.3 Electric shock WARNING Factor How to avoid / Measure (1) Before establishing electrical connections, be sure to turn off the power. Be sure to connect to ground. (2) Be sure to close the cover of the motor terminal box first and then operate the pump.
  • Page 21: Caution

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 1.2 Material Safety Data Sheet Chemicals used for this pump Pump oil BARRIERTA J100 FLUID (NOK KLUBER) : BARRIERTA J100 FLUID E (NOK KLUBER) FOMBLIN YL-VAC 25/6 (SOLVAY SOLEXIS) IMPORTANT The Material Safety Data Sheet (abbrev: SDS) shows chemicals you may use or touch during the operation of this machine.
  • Page 22: Overview Of Pump

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 2. Overview of Pump This instructions manual describes important information to use these items safely and continuously. Before using the product, be sure to read the instructions manual. The GR series is a dry vacuum pump with a simple structure having minimum necessary functions for general industry application based on many years of experience in the technology of a root type dry vacuum pump.
  • Page 23: System Flow

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Oil is used on gears and bearings for lubrication but enclosed liquid, such as oil, is not used in the rotor/casing. The special sealing structure keeps oil from entering in the rotor/casing, providing clean exhaust.
  • Page 24: Specifications

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 2.3 Specifications Motor of the pump, 200V-class (200 ~ 240V 50 / 60Hz) and 400V class (380 ~ 415V 50HZ, 380 ~ 460V 60Hz) is common. However, 200 ~ 240V 50 / 60Hz and 380 ~ 415V 50HZ, 380 requires a change of the connection in ~ 460V 60Hz.
  • Page 25 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 GR180 Frequency Maximum exhaust 183 (3100) 237 (3950) velocity (L/min.) Maximum intake Atmospheric pressure pressure ※ Ultimate pressure Maximum exhaust Atmospheric pressure pressure Motor Totally enclosed fan, Flange type, Three-phase two-pole 7.5 kW AC motor...
  • Page 26: External Dimensional Drawing

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 2.4 External Dimensional Drawing GR60...
  • Page 27 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 GR90...
  • Page 28 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 GR180...
  • Page 29: Mounting

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 3. Mounting (1) Install and operate this product according to the local and national safety laws and regulations (such as fire laws and electric wiring code). Accordingly, you are required to take classes for general safety that are valid in the country and the local area at the site.
  • Page 30: Oil Filling

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 3.2 Oil filling For both the two oil level gauges, check that the oil level is between the upper and lower level lines. If the oil level is between the level lines of the oil level gauges when operation stops, the pump can be operated.
  • Page 31 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 (1) Wear protective equipment, such as rubber gloves and protective glasses. CAUTION (2) Before starting the oil filling work, read "1.2 Material Safety Data Sheet" in advance. In the event that the vacuum pump oil contacts your hands or enters your eyes, follow the section about emergency measures in the Material Safety Data Sheet.
  • Page 32 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 mechanical seal may deteriorate. In such a case, the mechanical seal needs to be replaced. Contact the nearest service center. This product uses mechanical seal. If the pump needs to be operated after it has been stopped for three months or longer or after it is relocated, the oil film may not be formulated at the sealing part of the mechanical seal and it is not sealed.
  • Page 33: Intake Port Pipe

    Wear gloves and do not touch any vacuum parts with your bare hands. In addition, connect the pump's intake port and the pipe with VF50 (GR60) or VF80 (GR90 and GR180). To prevent the vibration on the pump from propagating to the vacuum chamber, we recommend connecting a bellows pipe.
  • Page 34: Exhaust Port Pipe

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 3.4 Exhaust port pipe Connect the pump exhaust port and the duct pipe etc. with NW40. In addition, this has no silencer function by default. In consideration of the work environment, attach the silencer (a paid option) as necessary.
  • Page 35: Nitrogen Gas Pipe

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 3.5 Nitrogen gas pipe The pump nitrogen gas port is Rc 1/4. Connect to the nitrogen gas pipe using an appropriate joint. Supply pressure MPaG 0.1 - 0.5 Adjusting pressure MPaG 0.05-0.10 (During operation)...
  • Page 36: Cooling Water Pipe

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 3.6 Cooling water pipe The pump cooling water port is Rc 3/8. Connect to the cooling water pipe using an appropriate joint. Supply water pressure MPaG 0.1 - 0.3 Pressure difference between outlet and inlet...
  • Page 37 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Drain Feed 3-phase valve water power supply valve Cooling water amount is equal to or lower than the specified value. -> Flow Shut out. Electro- sensor Leak detected. -> Shut out.
  • Page 38: Electric Connection

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 3.7 Electric Connection (1) The motor electric connection shall be made in reference to the figure below. After the connection is established, re-check that all screws in the motor terminal are tightened.
  • Page 39 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Since this pump adopts the 200V class / 400V class sharing motor, by changing the connection of the internal motor terminal box, but you can drive a 200V class and 400V class without motor exchange, 200 to 240V at 50 / 60Hz and 380 ~ 415V 50HZ, 380 ~ 460V 60Hz is required to change the connection.
  • Page 40 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 To prevent a motor burnout due to overcurrent, install overload protective equipment in the electric connections. If overload protective WARNING equipment is not installed or it is installed but not suitable for the motor capacity, a motor burnout or fire may occur.
  • Page 41: Operation

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 4. Operation 4.1 Operational Precautions (1) Do not operate the vacuum pump with any devices that cause clogging of the exhaust attached on the exhaust port side in such a way that they disturb the gas flow.
  • Page 42: Operation Start

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 4.2 Operation Start Check that piping work and wiring connection work are completed. Oil Level Check ("3.2 Oil Filling") For both the two oil level gauges, check that the oil level is between the upper and lower level lines.
  • Page 43: Operation Stop

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 4.3 Operation Stop For a while after the operation stops, do not touch the vacuum pump, motor, and pipes since they are subjected to high temperature. If your body comes into contact with them, you may get burned. Supply cooling WARNING water until the pump temperature becomes low.
  • Page 44: Pump Performance

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 5. Pump Performance 5.1 Exhaust velocity Pressure Pa...
  • Page 45: Removal

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 6. Removal 6.1 Electric connection Install and operate this product according to the local and national safety WARNING laws and regulations (such as fire laws and electric wiring code). (1) Check that no current is applied using a tester etc.
  • Page 46: Nitrogen Gas Pipe

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 6.3 Nitrogen gas pipe (1) Before removal of the nitrogen gas pipes, close the feed valve of nitrogen gas. (2) The pipe on the device side has residual pressure. Install a pressure...
  • Page 47: Maintenance

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 7. Maintenance 7.1 Inspection Check the following items at least once a day. It is effective to avoid a breakdown and extend the lifetime. When the operation stops, are the oil levels between the upper and lower level lines at the two oil level gauge? ●...
  • Page 48 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 The following list shows parts to be replaced at the time of an overhaul. The replacement period depends on the part and the parts in the list are grouped by replacement period (years). However, in some cases, the replacement period depends on the conditions of use.
  • Page 49: Trouble Check List

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 7.4 Trouble Check List Trouble Cause Disposal method Remarks The pump does not The motor wire connection is Check the wire connections. rotate. not correct. The safety circuits, such as an...
  • Page 50 Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Trouble Cause Disposal method Remarks The pressure does not The exhaust capacity of the Set up the pump again. decrease. pump is low compared to the capacity vacuum chamber. pressure measurement Measure the pressure correctly.
  • Page 51: Disposal

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 8. Disposal When disposing of the vacuum pump, follow the laws and the regulations of local government. Especially after the exhaust of toxic gas, please ask a professional company to dispose of the pump.
  • Page 52: Warranty Clause

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 9. Warranty Clause This product is shipped after strict internal inspection. If you find any manufacturing defects, accidents during the transportation, or other defects attributed to our responsibility, please contact our Components Division at headquarters or the nearest sales office or agency.
  • Page 53: Others

    Instructions Manual - Multiple Roots Type Dry Pump GR60/90/180 YK09-0023-DI-003-02 Direct export: An alternative is delivered or the product is sent back to us or the nearest our service center for repair. The return cost shall be borne by the customer.
  • Page 54 This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.

This manual is also suitable for:

Gr90Gr180

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