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Ulvac GHD-031A Instruction Manual page 41

Oil sealed rotary vacuum pump

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7.
Disposal
Follow state law and local government regulations for disposal of the pump.
Caution
In case a harmful toxic gas has been exhausted by accident, ask a specialist for
waste disposal. Not only the pump itself but also the pump oil becomes toxic.
For the disposal of pump oil, follow the instructions given under "Cautions for
disposal" In "Safety Data Sheet."
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This manual is also suitable for:

Ghd-031b