Ulvac GHD-031A Instruction Manual page 3

4．Operation
4.1 Cautions for operation
4.2 Start of operation
4.3 Stopping the operation
4.4 Operation in cold climates
4.5 Thermal protector
4.6 Magnet coupling
4.7 Oil mist trap (Option)
4.8 Restriction on operation when the oil mist trap is installed ・・・・・・・・・・18
5．Pump performance
5.1 Ultimate pressure
5.2 Pumping speed
5.3 Power requirement
6．Maintenance, Inspection and Repair
6.1 Maintenance
6.2 Periodic inspection
6.3 Replacement of the pump oil
6.4 Trouble check list
7．Disposal
8．Maintenance parts
8.1 Maintenance parts list
8.2 Disassembly drawing
Warranty
Safety Data Sheet (SDS) for Vacuum Pump Oil R-2
Pump usage check sheet (Use this sheet for requesting an overhaul.)
Sales, service agency, and the where to make contact
Contents－02
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