Ulvac GHD-031A Instruction Manual page 34

Frequency Item
Oil
Sound
Once/3 days
Vibration
Current value Difference from the rated value.
Surface
temperature
Once/week
Oil leakage
Once/
3000hours
Oil
or
once/6 months
Warning
When requesting the manufacturer's service department to overhaul the pump, always
write the type of the vacuumed gas on the "Pump Usage Check Sheet" attached at
the back of this manual and submit it. Note that if toxic gases are exhausted, both
the pump itself and pump oil will become contaminated. Please be sufficiently aware
that use with some gases will preclude overhaul.
Table 4. Periodic inspection table
Measures Details
Amount.
Color (Reddish brown, dark blown,
and cloudy white are not good.)
Abnormal sound.
Abnormal vibration.
Surface temperature
(The temperature higher than the
room temperature by 40K or more is
abnormal.)
Oil leakage from the plugs.
Clogged with dust.
－24－
Measures
Refill the oil.
Replace the oil.
Check nuts and bolts for looseness.
If not clear, contact us.
Check the cause of an overload.
If not clear, contact us.
Check the cause of an overload.
If not clear, contact us.
Replace seals, or contact us.
Replace the oil.