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6.3 Replacement
of the pump oil
The pressure of the vacuum device may increase due to the deterioration of the pump
oil. In such a case, close the inlet port of the pump and check that the specified ultimate
pressure has been reached.
If not, replace the pump oil. If substances having a high vapor pressure (such as moisture
or solvents) are mixed with the pump oil, or if sludge is accumulated at the bottom
of the pump, the ultimate pressure cannot be reached with only one replacement and the
pump oil must be replaced several times.
The deterioration of the pump oil is caused not only by the contamination due to evacuated
gas but also by the changes in the properties of the pump oil itself (depending on the
operation time). Periodic replacement in accordance with Table 4 showing an oil
replacement guide is recommended.
Warning
Keep in mind that if the pump was used in accordance with its exhausting toxic gas,
both the pump unit and pump oil might become contaminated.
Caution
Wear protective equipment such as rubber gloves and safety goggles.
Be sure to read the attached "Safety Data Sheet." before adding oil. If the oil
accidentally comes into contact with your hands or enters your eyes, take proper
measures in accordance with the section "First-aid treatment" shown in "Safety
Data Sheet."
Note
Use only oils specified by us(R-2)． If other oils are used, the pump performance
will deteriorate or its life will shorten.
－25－
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