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Ulvac GHD-031A Instruction Manual page 38

Oil sealed rotary vacuum pump

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6.4
Trouble check list
Problem
The pump does not
rotate.
The pump's
rotation is unstable.
Table5. Trouble check list
Cause
①The pump is not connected to the
power supply.
②The power switch is not turned
on.
③ Problem with power supply
voltage.
④The overload protector has
actuated.
⑤The motor malfunctions.
⑥ Low ambient temperature has
increased the oil viscosity.
⑦The entrance of foreign matter
into the pump caused the rotor
to burn out.
⑧ Moisture
or
solvents
sucked in, forming rust inside
the pump.
⑨Reaction product accumulated in
the pump when the pump stops
after exhausting reactive gas.
⑩ Water absorption expands the
vanes.
⑪ Components inside the pump
have burnt out.
① Problem with power supply
voltage.
②Defective wiring to the pump.
③ Low ambient temperature has
increased the oil viscosity.
④Foreign matter has entered the
pump.
①Connect the pump to the power
supply.
②Turn on the power switch.
③Set the power supply voltage to
within ±10% of the rated
voltage.
④Wait till the temperature goes
down to 76 ± 15℃.
⑤Replace the motor.
⑥Increase the ambient
temperature to 7℃ or more.
⑦Overhaul (replace the cylinder
and rotor).
⑧Overhaul (replace the cylinder
were
and rotor).
⑨Overhaul (cleans the pump
inside and removes reaction
products).
⑩Overhaul (replace the vanes).
⑪Overhaul (replace the damaged
components).
①Set the power supply voltage to
within ±10% of the rated
voltage.
②Perform wiring to the pump
again.
③Increase the ambient
temperature to 7℃ or more.
④Disassemble and clean the
pump to eliminate foreign
matter.
-28-
Measures
Reference
3.4
4.2
3.5
4.5
6.2
4.4
6.2
6.2
6.2
6.2
6.2
3.5
3.4
4.4
6.2

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This manual is also suitable for:

Ghd-031b