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Summary of Contents for PI NanoCube P-616
- Page 1 PZ268EN | 2/17/2025 User Manual P-616 NanoCube® Nanopositioner This document describes the following product: ▪ P-616.3C Parallel-kinematic NanoCube® XYZ nanopositioner, 100 µm × 100 µm × 100 µm travel range, capacitive sensors W W W . P I . W S...
- Page 2 Linux® is the registered trademark of Linus Torvalds. NI LabVIEW™, National Instruments™, and NI™ are trademarks of National Instruments. Neither the driver soft- ware nor any software programs or other goods or services offered by PI are affiliated with or sponsored by Na- tional Instruments.
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Page 3: Table Of Contents
PZ268EN | 2/17/2025 Contents About this document ..........................Objective and target group of this user manual ................Symbols and typographic conventions ..................... Figures............................... Other applicable documents......................Downloading manuals ........................... Safety ..............................Intended use ............................. General safety instructions ....................... Organizational measures ........................3.3.1 User manual ......................... - Page 4 PZ268EN | 2/17/2025 Starting and operating ........................... 28 General notes on starting and operating..................28 Operating the product ........................29 Discharging the product........................30 Maintenance ............................31 General notes on maintenance......................31 Cleaning the product ........................31 Troubleshooting ............................ 32 Customer service ...........................
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Page 5: About This Document
1 About this document PZ268EN | 2/17/2025 About this document Objective and target group of this user manual This user manual contains the information necessary for using the P-616 as intended. Basic knowledge of closed-loop systems, drive technologies, and suitable safety measures is as- sumed. -
Page 6: Figures
For better clarity, the illustrations can vary in color, proportions, and level of detail compared to ac- tual circumstances. Photographic illustrations can also differ and must not be seen as guaranteed properties. Other applicable documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Product Document... -
Page 7: Downloading Manuals
Ø Contact our customer service (p. 34). Downloading manuals 1. Open the website www.pi.ws. 2. Search for the product number (e.g., P-616) on the website. 3. Select the corresponding product to open the product page. 4. Select the Downloads tab. à The manuals are shown under Documentation. Software manuals are shown under General Software Documentation. -
Page 8: Safety
(p. 13) available from PI. The electronics are not included in the scope of delivery of the P-616. The electronics must provide the required operating voltages. For closed-loop operation, it must be able to read out and process the signals of the position sensors. -
Page 9: Organizational Measures
3 Safety PZ268EN | 2/17/2025 Ø Use screws to secure the connector of the positioner against being disconnected from the elec- tronics. If the protective earth conductor is not connected or is not connected properly, hazardous touch voltages can occur on the P-616 during system malfunction or failure. Touching the P-616 when touch voltages are present can result in minor injury due to electric shock. -
Page 10: Personnel Qualification
3 Safety PZ268EN | 2/17/2025 3.3.2 Personnel qualification The P-616 may only be installed, started, operated, maintained, and cleaned by authorized and ap- propriately qualified personnel. M O T I O N | P O S I T I O N I N G 10 / 43... -
Page 11: Product Description
4 Product description PZ268EN | 2/17/2025 Product description Product view Fig. 1: P-616 product view 1 Base body 2 M2 hole for mounting the load, depth 2.5 mm (3 × 2 holes) 3 XYZ mounting platform (movable part of 4 Countersunk hole (2×) for mounting the P-616, also referred to as "motion onto surface platform") -
Page 12: Scope Of Delivery
4 Product description PZ268EN | 2/17/2025 Label Description Old equipment disposal (p. 41) WWW.PI.WS Manufacturer's address (website) CE conformity mark Protective earth symbol, indicates the protective earth con- nector (p. 17) on the P-616 "Residual Voltage" warning sign on the connector of the P-616: Indicates risk of electric shock (p. 28) -
Page 13: Suitable Electronics
Piezo amplifier, 3 channels, -20 to 120 V, benchtop device * P-895.3DLC adapter cable required, available as optional accessory (p. 12) PC software is included in the scope of delivery of the controllers from PI. The operation of the con- trollers is described in the corresponding user manuals. Technical features 4.6.1... -
Page 14: Capacitive Sensors
4 Product description PZ268EN | 2/17/2025 A flexure guide is an element that is free of static and sliding friction. It is based on the elastic defor- mation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts. Flexure ele- ments have a high stiffness and load capacity. -
Page 15: Unpacking
5 Unpacking PZ268EN | 2/17/2025 Unpacking NOTICE Damage to the P-616 due to incorrect handling! Impermissible mechanical stress on the cover on the underside of the P-616 and the XYZ mounting platform can damage the P-616 and lead to loss of accuracy. Ø... -
Page 16: Installation
Unsuitable cables can cause damage to the P-616 and to the electronics. Ø Use cables from PI only for connecting the P-616 to the electronics. M O T I O N | P O S I T I O N I N G... -
Page 17: Connecting The Product To The Protective Earth Conductor
6 Installation PZ268EN | 2/17/2025 NOTICE Damage due to improper mounting! Improper mounting of the P-616 or incorrectly mounted parts can damage the P-616. Ø Only use the holes or threads intended for the purpose of fixing the P-616 and loads. Ø... - Page 18 6 Installation PZ268EN | 2/17/2025 The P-616 has an M4 hole for attaching the protective earth conductor. This hole is marked with the protective earth conductor symbol . For more details refer to Product view (p. 11) Dimen- sions (p. 40). Fig. 3: Installing the protective earth conductor (profile view) 1 Base body of the product 2 Flat washer 3 Lock washer...
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Page 19: Mounting The Product
6 Installation PZ268EN | 2/17/2025 Mounting the product NOTICE Warping of the P-616 when mounted on uneven surfaces! Mounting the P-616 on an uneven surface could warp the P-616. Warping reduces the accuracy. Ø Mount the P-616 on an even surface. The recommended flatness of the surface is ≤ 100 µm. Ø... -
Page 20: Fixing The Load
6 Installation PZ268EN | 2/17/2025 Fig. 5: Countersunk holes, Ø 3.2 mm / Ø 6.5 mm for mounting the P-616 Requirements – You have read and understood the general notes on installation (p. 16). – The P-616 is not connected to the electronics. Tools and accessories –... - Page 21 6 Installation PZ268EN | 2/17/2025 NOTICE Mechanical overload due to excessive torques and high loads! High torques when fixing the load, as well as high loads, can overload the XYZ mounting platform of the P-616. Mechanical overload can damage the piezo actuators, sensors, and flexures of the P-616 and lead to loss of precision.
- Page 22 6 Installation PZ268EN | 2/17/2025 NOTICE Excessively long screws! Screws inserted too deeply can damage the P-616. Ø Pay attention to the depth of the mounting holes in the motion platform (p. 40). Ø Only use screws with the correct length for the respective mounting holes. Information Positive direction of axis motion is specified in the product view...
- Page 23 6 Installation PZ268EN | 2/17/2025 Fig. 7: P-616.3C: Tall setup and center of load too far above the motion platform Fig. 8: P-616.3C: Unwanted levering effect and center of load to the side of the motion platform M O T I O N | P O S I T I O N I N G 23 / 43...
- Page 24 6 Installation PZ268EN | 2/17/2025 Fig. 9: P-616.3C: Holes for fixing the load Requirements – You have read and understood the general notes on installation (p. 16). – The P-616 is not connected to the electronics. Tools and accessories – M2 screws of suitable length, see Dimensions (p. 40) –...
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Page 25: Fixing The Fiber Holder
6 Installation PZ268EN | 2/17/2025 Fixing the fiber holder Fig. 10: P-616.3C. Position of the 6 fastening screws for the XYZ mounting platform Fig. 11: P-616.3C: Mounted fiber holder (1 of the 6 fastening screws is concealed) Requirements – You have read and understood the general notes on installation (p. 16). -
Page 26: Connecting The Product To The Electronics
6 Installation PZ268EN | 2/17/2025 Connecting the product to the electronics Information Systems consisting of a P-616 and electronics are calibrated at the factory to achieve optimum per- formance. Ø Pay attention to the assignment of the axes to the electronics channels specified on the calibra- tion label of the electronics. - Page 27 6 Installation PZ268EN | 2/17/2025 - T2 to T for channel 2 (SERVO 2) - P2 to P for channel 2 (SERVO 2) - T3 to T for channel 3 (SERVO 3) - P3 to P for channel 3 (SERVO 3) M O T I O N | P O S I T I O N I N G 27 / 43...
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Page 28: Starting And Operating
7 Starting and operating PZ268EN | 2/17/2025 Starting and operating General notes on starting and operating CAUTION Risk of electric shock if the protective earth conductor is not connected! If the protective earth conductor is not connected or is not connected properly, hazardous touch voltages can occur on the P-616 during system malfunction or failure. -
Page 29: Operating The Product
Operating voltage excessively high or incorrectly connected! Excessively high or incorrectly connected operating voltages can cause damage to the P-616. Ø Operate the P-616 only with controllers/drivers and original accessories from PI. Ø Do not exceed the operating voltage range (p. 36) specified for the P-616. -
Page 30: Discharging The Product
– Before disassembling (e.g., before cleaning and transporting the P-616 and prior to modifica- tions) The P-616 is discharged via the discharge resistor inside the electronics from PI. Discharging a positioner connected to the electronics In closed-loop operation: 1. Switch off the servo mode on the controller. -
Page 31: Maintenance
8 Maintenance PZ268EN | 2/17/2025 Maintenance General notes on maintenance NOTICE Misalignment from loosening screws! The P-616 is maintenance-free and achieves its positioning accuracy as a result of the optimal alignment of mechanical components and piezo actuators. Loosened screws cause a loss in posi- tioning accuracy. -
Page 32: Troubleshooting
9 Troubleshooting PZ268EN | 2/17/2025 Troubleshooting Malfunction Possible causes Solution Ø Check the cable connections. No or limited motion Cable is not connected cor- rectly Ø Do not exceed the maximum permissi- Excessive load ble loads according to the specifications (p. 35). - Page 33 9 Troubleshooting PZ268EN | 2/17/2025 Malfunction Possible causes Solution The positioner starts Servo control parameters 1. Immediately switch off the servo mode oscillating or posi- wrongly set because, for ex- of the corresponding positioner axes. tions inaccurately ample, the load was changed 2.
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Page 34: Customer Service
10 Customer service PZ268EN | 2/17/2025 Customer service For inquiries and orders, contact your PI sales engineer or send us an email: service@pi.de If you have questions regarding your system, provide us with the following information: – Product and serial numbers of all products in the system –... -
Page 35: Specifications
11 Specifications PZ268EN | 2/17/2025 Specifications 11.1 Technical data Subject to change without notice. You can find the latest product specifications on the product web page at www.pi.ws. Motion Unit Tolerance P-616.3C Active axes X | Y | Z Travel range in X µm... -
Page 36: Maximum Ratings
The bidirectional repeatability refers to a 10% step and is a 1 sigma value. At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indica- tes a statistical average for a property;... -
Page 37: Ambient Conditions And Classifications
11 Specifications PZ268EN | 2/17/2025 Maximum operating voltage Maximum operating frequency Maximum power consump- (unloaded) tion -20 to +120 V 220 Hz (in X) 4.3 W (per axis) 220 Hz (in Y) 220 Hz (in Z) To ensure stable operation, the maximum operating frequency has been defined as around one third of the mechanical resonant frequency. -
Page 38: Pin Assignment
11 Specifications PZ268EN | 2/17/2025 Screw size Minimum torque Maximum torque 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm Ø Pay attention to the screw-in depth required for the respective material in accordance with VDI directive 2230. - Page 39 11 Specifications PZ268EN | 2/17/2025 Signal Function (not assigned) Input Piezo voltage +, channel 3 Input Piezo voltage +, channel 2 Input Piezo voltage +, channel 1 Input Target sensor signal, channel 1 movable part of the capacitive sensor) Shielding for target sensor signal, channel 2 Shielding for target sensor signal, channel 3 (not assigned) (not assigned)
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Page 40: Dimensions
11 Specifications PZ268EN | 2/17/2025 11.6 Dimensions Fig. 13: P-616.3C, dimensions in mm. Note that the decimal points are separated by a comma in the drawings. M O T I O N | P O S I T I O N I N G 40 / 43... -
Page 41: Old Equipment Disposal
Dispose of your old device according to international, national, and local rules and regulations. In order to fulfill the responsibility as the product manufacturer, Physik Instrumente (PI) SE & Co.KG undertakes environmentally correct disposal of all old PI equipment made available on the market after August 13, 2005 without charge. -
Page 42: European Declarations Of Conformity
13 European declarations of conformity PZ268EN | 2/17/2025 European declarations of conformity For the P-616, declarations of conformity were issued according to the following European statu- tory requirements: Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMV: EN 61326-1 RoHS: EN IEC 63000... - Page 43 Physik Instrumente (PI) SE & Co. KG Auf der Römerstraße 1 76228 Karlsruhe Germany Phone: +49 712 4846-0 Fax: +49 712 4846-1019 info@pi.de www.pi.de...
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