Attaching The Payload To The Stage; Electrical Installation; Air Requirements - Aerotech ABL9000 Series User Manual

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ABL/ABLH9000 Series Stage User's Manual

2.4. Attaching the Payload to the Stage

To prevent damage to payloads, test the operation of the stage before the payload is attached to the stage
table. Proceed with the electrical installation and test the motion control system in accordance with the sys-
tem documentation. Document all results for future reference. For information on electrical connections, refer
to Section 2.5. and the documentation delivered with the stage.
The payload should be flat, rigid, and comparable to the stage in quality.
N O T E : For valid system performance, the mounting interface should be flat within 1 µm per 50 mm.

2.5. Electrical Installation

Stages come from the factory completely wired and assembled. Due to the custom nature of the
ABL/ABLH9000 series stages, there is no standard wiring procedure. Each ABL/ABLH9000 stage is shipped
with documentation regarding the stage wiring, controller interface connectors, and specs for each particular
stage.
Never connect or disconnect any electrical component or connecting cable while power is
applied, or serious damage can result.

2.6. Air Requirements

The air and vacuum supplies to the air bearing are important for the operation of the system. If compressed air
is used, it must be filtered to 0.25 microns, dry to 0ºF dewpoint, and oil free. If nitrogen is used, it must be
99.99% pure and filtered to 0.25 microns. Air pressure of 80 psi, ±5 psi, is necessary for use. Air should be
supplied via a 1/4" OD (1/8" ID) polyurethane air hose. It is recommended that a pressure switch is installed
to remove power from the air bearing if pressure drops below 40 psi because the bearing surfaces could be
damaged. Vacuum requirements are between 20" Hg and 24" Hg (approx. 1/8 hp pump). The stage can be run
without vacuum, but accuracy will be severely affected.
An air flow rate of .65 CFM at 80 psi should be observed, as well as a vacuum flow rate of .23 CFM at 22" Hg.
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Chapter 2
Installation
9

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