Related Manuals for Aerotech APR100DR Series
Summary of Contents for Aerotech APR100DR Series
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Page 1: Apr100Dr High-Precision Mechanical Bearing Rotary Stage
APR100DR High-Precision Mechanical Bearing Rotary Stage HARDWARE MANUAL Revision 2.00... - Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
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Page 3: Table Of Contents
3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Travel Adjustment 4.3.1. Optical Limit Adjustments 4.3.2. Mechanical Hard Stop Adjustments 4.4. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com... -
Page 4: List Of Figures
Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-8: Encoder Phasing Reference Diagram (Analog/Sine Wave) Figure 4-1: APR100DR Limit Flag Adjustment Figure 4-2: Tabletop Screw Locations Figure 4-3: Assembly Showing Hard Stops Figure 4-4: Hard Stop Placement Examples Figure 4-5: Tabletop Detail www.aerotech.com... -
Page 5: List Of Tables
APR100DR List of Tables Table 1-1: Model Numbers and Ordering Options Table 1-2: Environmental Specifications Table 1-3: APR100DR Series Specifications Table 2-1: Stage Mounting Surface Flatness Requirement Table 2-2: Stage to Mounting Surface Hardware Table 2-3: Mounting Interface Flatness Requirement... -
Page 6: Eu Declaration Of Incorporation
APR100DR Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: APR100DR stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended; and that the following harmonized European standards have been applied:... -
Page 7: Ukca Declaration Of Incorporation
Hardware Manual APR100DR UKCA Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: APR100DR stage To which this declaration relates, meets the essential health and safety requirements and is in conformity with the relevant UK Legislation listed below:... -
Page 8: Safety Procedures And Warnings
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments. -
Page 9: Installation And Operation
WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com... -
Page 10: Electrical Warnings
It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com... -
Page 11: Motor-Related Warnings
Hardware Manual APR100DR Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you use or operate a stage or system that incorporates Aerotech motors. DANGER: Mechanical Hazard! Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage. -
Page 12: Pinch Points
(during normal operation, for example). when the system is moved manually (during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 1: Typical Pinch Point Locations www.aerotech.com... -
Page 13: Handling And Storage
Carefully remove the stage from its protective shipping container. Lift this product only by the base. For multi-axis assemblies, always lift the system by the lower axis. Use a cart, dolly, or similar device to move the stage to a new location. www.aerotech.com... - Page 14 Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. Each stage has a label listing the system part number and serial number. These numbers contain information necessary for maintenance or system hardware and software updates.
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Page 15: Chapter 1: Overview
Integration (Required) Test as system: Testing, integration, and documentation of a group of components as a -TAS complete system that will be used together. Test as components: Testing and integration of individual items as discrete components -TAC that ship together. www.aerotech.com... -
Page 16: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time. -
Page 17: Basic Specifications
(3) Maximum speed listed is stage and motor dependent (and assumes a 340 V bus). The actual speed could be lower due to motor back emf or encoder bandwidth. Consult an Aerotech Applications Engineer for more details. (4) Mass listed is for the standard stage option (no brake and no tabletop). Consult Aerotech for brake and tabletop masses. www.aerotech.com... -
Page 18: Vacuum Operation
6. To reduce outgassing during the initial pump-down to vacuum pressure, Aerotech recommends that you bake out vacuum systems when you first install them into the vacuum chamber. Bake the vacuum components at 60 °C for 24 to 48 hours to desorb water vapor from surfaces and... -
Page 19: Chapter 2: Installation
Chapter 2: Installation The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: APR100DR Dimensions www.aerotech.com... -
Page 20: Securing The Stage To The Mounting Surface
Flatness Requirement All Frame Sizes 5 µm APR100DR series stages have a fixed mounting pattern available to secure the stage to a mounting surface. Figure 2-2 shows the main mounting holes in the base of the stage. Tightening torque values for the mounting hardware are dependent on the properties of the surface to which the stage is being mounted. -
Page 21: Figure 2-2: Apr100Dr Stage Mounting Holes
Hardware Manual APR100DR Figure 2-2: APR100DR Stage Mounting Holes www.aerotech.com... -
Page 22: Attaching The Payload Or Fixturing To The Stage
If you start the APR100DR without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance. -
Page 23: Figure 2-3: Cantilevered Load Capabilities
Hardware Manual APR100DR Figure 2-3: Cantilevered Load Capabilities www.aerotech.com... - Page 24 APR100DR Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 25: Chapter 3: Electrical Installation
Aerotech motion control systems are adjusted at the factory for optimum performance. When the APR100DR is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections. -
Page 26: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If you are using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 27: Table 3-1: High Power D-Style Motor Connector Pinout
Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-2: Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com... -
Page 28: Table 3-3: Feedback Connector Pinout (-E1, -E2, -E3, -E5, -E6 Options)
“machine negative” or “machine counter-clockwise” direction.) [with the Limited Travel option] Brake + [with -BK option] Table 3-4: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell... -
Page 29: Table 3-5: Feedback Connector Pinout (-E4 Option)
“machine negative” or “machine counter-clockwise” direction.) [with the Limited Travel option] Brake + [with -BK option] Table 3-6: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell... -
Page 30: Table 3-7: Secondary Feedback Connector Pinout (-E5 And -E6 Options)
5V Power Supply Input Reserved Reserved Reserved Reserved MRK+ (Encoder Marker+) SIN+ (Encoder Sine+) COS+ (Encoder Cosine+) Reserved Table 3-8: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N 15-Socket D-Connector ECK01022 Amphenol 17E-1725-2 Backshell ECK00326 Amphenol DA15S064TLF www.aerotech.com... -
Page 31: Motor And Feedback Wiring
Hardware Manual APR100DR 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-2: APR100DR Motor and Feedback Wiring (-E1, -E2, -E3) www.aerotech.com... -
Page 32: Figure 3-3: Apr100Dr Motor And Feedback Wiring (-E4)
APR100DR Hardware Manual Figure 3-3: APR100DR Motor and Feedback Wiring (-E4) www.aerotech.com... -
Page 33: Figure 3-4: Apr100Dr Motor And Feedback Wiring (-E5, -E6)
Hardware Manual APR100DR Figure 3-4: APR100DR Motor and Feedback Wiring (-E5, -E6) www.aerotech.com... -
Page 34: Motor And Feedback Specifications
11840 Lines/Rev 0.028/0.007 arc sec/line 0.000301 arc sec/line 0.109 arc sec/line 0.014 arc sec/line (1) -E1 shows x4000/x16000 total interpolation. Table 3-13: Max Speed Per Encoder Bandwidth Model -E2, -E5 -E3, -E6 APR100DR Motor Limited Motor Limited 147 rpm 18 rpm www.aerotech.com... -
Page 35: Table 3-14: Limit Switch Specifications
Note: If the APR100DR is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Table 3-15: Brake Specifications Specification Supply Voltage 24 VDC Supply Current 690 mA Typical (1) Required to release the brake and allow motion. www.aerotech.com... -
Page 36: Table 3-16: Apr100Dr Motor Specifications
7. Maximum winding temperature is 100 °C (thermistor trips at 100 °C). 8. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures. 9. All Aerotech amplifiers are rated A ; use torque constant in N·m/A when sizing. -
Page 37: Limits, Marker, And Machine Direction
Hardware Manual APR100DR 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.2.). -
Page 38: Motor And Feedback Phasing
APR100DR Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-6: Hall Phasing Diagram www.aerotech.com... -
Page 39: Figure 3-7: Encoder Phasing Reference Diagram (Standard/Square Wave)
Hardware Manual APR100DR Figure 3-7: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-8: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com... - Page 40 APR100DR Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 41: Chapter 4: Maintenance
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the APR100DR and any components and cables as needed. Repair any damage before operating the APR100DR. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com... -
Page 42: Cleaning And Lubrication
4. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. -
Page 43: Travel Adjustment
Stages with the limit option have the optical limits set at the factory prior to shipment. Stages shipped with the limits option but without the brake option can be retrofitted to achieve a different limit travel. Determine the amount of travel required and contact Aerotech to order the correct Limit Flag. -
Page 44: Figure 4-1: Apr100Dr Limit Flag Adjustment
APR100DR Hardware Manual Figure 4-1: APR100DR Limit Flag Adjustment www.aerotech.com... -
Page 45: Mechanical Hard Stop Adjustments
Stages equipped with the hard stop option (-HS) have the hard stops set at the factory prior to shipment. Although the hard stops are adjustable, contact Aerotech before you change their position because the optical limits could need to be updated. If you change the hard stop position but do not update the optical limits, the stage travel could hit a hard stop and cause damage the stage or payload. -
Page 46: Figure 4-3: Assembly Showing Hard Stops
APR100DR Hardware Manual 3. Remove the M3 pull-out pin and M3 socket head cap screw from each hard stop (Figure 4-3). Figure 4-3: Assembly Showing Hard Stops www.aerotech.com... -
Page 47: Figure 4-4: Hard Stop Placement Examples
D. Incrementally tighten each M5 socket head cap screws to a final torque of 5 N·m. E. Go to Step 5A. 6. Reinstall the Graduated Scale Ring in the same orientation that it was removed. Figure 4-5: Tabletop Detail www.aerotech.com... -
Page 48: Troubleshooting
Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com... -
Page 49: Appendix A: Warranty And Field Service
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense. - Page 50 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
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Page 51: Appendix B: Revision History
Hardware Manual APR100DR Appendix B: Revision History Revision General Information 2.00 New manual www.aerotech.com... - Page 52 APR100DR Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 53: Index
Electrical Installation Electrical Specifications S-76 red, anodized aluminum Electrical Warnings EN 60204-1 2010 EN ISO 12100 2010 S-76 Encoder Specifications Electrical Specifications EU 2015/863 Performance Specifications serial number 13-14 shims grease shipping brackets shipping clamps Solution solvents Hall-Effect Sensors Specifications www.aerotech.com... - Page 54 APR100DR Hardware Manual Specifications Brake Encoder Hall-Effect Sensors Limit Switch Thermistor Specifications stabilizing stage stage distortion stabilizing Storage Symptom Table of Contents Temperature Effects Thermistor Specifications Troubleshooting vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...
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