Ulvac G-TRAN Series Instruction Manual page 61

5.3.3.7. Saving status
Requests the status setting of
each channel.
Request
: CH
Response
: '0'
• [When saving] status setting list
SH (higher 4 bits)
Bit
Signal identification
No.
B7 FIL-2/1
B6 FIL-ON/OFF
B5 N･C
B4 DEGAS-ON/OFF
With IG
B7 NC
B6 HV-ON/OFF
B5 NC
B4 NC
With CCG,
SL (lower 4 bits)
Bit
Signal
No.
identification
B3
N･C
B2
N･C
B1
N･C
B0
N･C
If the status setting is invalid, NG will be sent in response.
Command that is effective only when CH = 1 .
Setting of CH1: IG, CCG is necessary.
When PG is set, status is not controlled.
'S' 'W' SH
'K' CR or
0〔30H〕 8〔38H〕 C 〔43H〕 4〔34H〕 D 〔44H〕 5〔35H〕
0
0
0
0
FIL-2/1
FIL-ON/OFF
DEGAS-ON/OFF
4 〔34H〕 0 〔30H〕
0 0
1 0
0 0
0 0
HV-ON/OFF
Value [ASCII code]
0〔30H〕
0 (X)
0 (X)
0 (X)
0 (X)
SL CR
: 'N' 'G'
Value [ASCII code]
1 1
0 1
0 0
0 0
1: FIL-1 0: FIL-2
1: ON 0: OFF
1: ON 0: OFF
1: ON 0: OFF
SL has no scene that sets a
value other than 0 .
Currently reserved for future
functions.
Reference: About ion gauge operation p. 21
53
CR
IG
0 1 0
1 1 1
0 0 0
0 1 1
With CCG, always 0
With CCG, always 0
CCG
IG、CCG