• PROTECT
Indicates that the measured pressure is above the higher limit of the measurement range when IG or
CCG is set.
The FIL/HV LED on the front panel blinks.
The sensor filament/high voltage is automatically turned off. However, it is necessary to enter
FIL/HV OFF as resetting action (status reset) because the PROTECT status is not automatically
reset.
• FIL OFF
Indicates the filament OFF status when IG (hot cathode ion gauge) is set.
• HV OFF
Indicates the high voltage output OFF status when CCG (cold cathode ion gauge) is set.
• NC
Indicates that the sensor unit is not present or it is not set.
16
IG、CCG
IG
CCG
PG、IG、CCG
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