Ulvac G-TRAN Series Instruction Manual page 47

Ion gauge (BMR2,SC1)
Pressure display value
[Pa]
9.9×10 -0
1.0×10 -0
5.0×10 -1
1.0×10 -1
5.0×10 -2
1.0×10 -2
5.0×10 -3
1.0×10 -3
5.0×10 -4
Measurement value output voltage can be converted to pressure values by the following equation.
where, P : Pressure value
V : Measurement value output voltage
E : Value from which decimal point is truncated from V
Note: The effective measurement range varies with the measuring unit.
Calculated value of V-E can be less than 0.1 depending on the output accuracy of this product
or the accuracy of the apparatus which reads in. In that case, Pressure value is calculated one
digit smaller according to above equation. Thus, when the calculated value of V-E becomes
less than 0.1, please convert to pressure value rounding it up into 0.1.
Ion gauge (SH2, ST2)
Pressure display value
[Pa]
9.9×10 -0
1.0×10 -0
5.0×10 -1
1.0×10 -1
5.0×10 -2
1.0×10 -2
5.0×10 -3
1.0×10 -3
5.0×10 -4
Output voltage Pressure display value
[V]
8.99
8.10
7.50
7.10
6.50
6.10
5.50
5.10
4.50
Reference: Setting of recorder output in combination mode p. 31
Output voltage Pressure display value
[V]
6.497
5.750
5.524
5.000
4.774
4.250
4.024
3.500
3.274
P = 10^{ ( V - 7.25 ) / 0.75 + 2 }[Pa]
39
[Pa]
1.0×10 -4
5.0×10 -5
1.0×10 -5
5.0×10 -6
1.0×10 -6
5.0×10 -7
1.0×10 -7
5.0×10 -8
1.0×10 -8
P = 10 (V-E) 10
[Pa]
1.0×10 -4
5.0×10 -5
1.0×10 -5
5.0×10 -6
1.0×10 -6
5.0×10 -7
1.0×10 -7
5.0×10 -8
Output voltage
[V]
4.10
3.50
3.10
2.50
2.10
1.50
1.10
0.50
0.10
-(8-E)
[Pa]
[Pa]
[V]
[V]
(p. 6)
Output voltage
[V]
2.750
2.524
2.000
1.774
1.250
1.024
0.500
0.274