Ulvac G-TRAN Series Instruction Manual page 54

• Internal processing
The internal circuit performs comparison of setpoints with one digit below decimal point like [□.□
10 □□ ]. Therefore,
Displayed value [□.□ 10
For example, if [5.0
pressure].
What is compared is the measured pressure value on display.
• Setpoint actuating conditions
Setpoint action is actuated only when the filament is ON and the emission current is normal. If the
emission current is not normal, the measured pressure value will not be correct either. Therefore,
the setpoint action is inhibited for the reason that it is not on the safe side to actuate the setpoint by
an incorrect value.
• Setpoint set value and CAL set value
Actuating the CAL function does not change the setpoint set value
automatically. Set the set point, as and if required.
• Setpoint of measuring unit and display unit
Setpoints of the display unit, sensor unit and box unit are independent of
other. Therefore, if the setpoint signal of the display unit and that of the measuring unit are taken
out separately, both will be effective.
Conversely, if the setpoint pins of the display unit and measuring unit are connected and the setpoint
signal from the display unit is taken out, only the value set on the display unit will be effective.
CAUTION: - Only hot cathode ion gauge -
When using the setpoint of the display unit, connect the emission valid line [4-pin] between the measuring
unit and the display unit. The setpoint is effective only when the emission current is normal.
4 ch. display interior
Internal 5V power supply
□□ ] = internally processed value [□.□ 10
10 -2 ] is set at the setpoint, it will be actuated when [5.0
PROTECT actuating signal -
Setpoint actuating signal-1
EM.Valid signal - OK/NG
Setpoint actuating signal-2
GN
D
Fig. 5.2.2 Setpoint output
46
□□ ]
PLCor computer interior
ON/OFF
ON/OFF
ON/OFF
Reference: Setpoint setting p. 28
10 -2 ≧ measured
IG
IG
each
IG
Internal power
supply
A
1 2
B
3 4
C
5 6
D
9 8