Figure 8. Agilent 4100 MP-AES, N
supplied from Onboard Argon Supply, POP gas supplied from the air compressor, EGCM configured
to supply air from the air compressor for organics analysis.
Nitrogen
Supply
Oil Free Air
Compressor
and Dryer
Total Compressed Air = 25+1.5 = 26.5 SLPM
Total Nitrogen (99.5%) = 25 SLPM
Total Nitrogen (99.95%) = 0 SLPM
Total Argon = 1.5 SLPM
Agilent 4100 Microwave Plasma Atomic Emission Spectrometer Site Preparation Guide
plasma gases supplied from cylinder/Dewar system, argon gas
2
Filter/ Regulator
Gas Requirements and Configurations
MP-AES
MP-AES Plasma
Gas Box
EGCM
57