Agilent Technologies 4100 Site Preparation Manual page 33

Table 6. Gas specifications at instrument connections
Purity
Oxygen
Water vapor
Quality
Permissible
pressure range
Recommended
regulated supply
pressure
Required flow
rates
The Agilent 4100 MP-AES instrument gas connections are fitted with
1/4 in Swagelok hardware.
Agilent 4100 Microwave Plasma Atomic Emission Spectrometer Site Preparation Guide
Argon Nitrogen
99.0 % 99.5 %
99.95% for N
mono purge
<0.5 %
<0.05% for N
mono purge
<4 ppm
200–440 kPa 450–600 kPa
(29–63 psi) (65–87 psi)
210 kPa (30 psi) 500 kPa (72.5 psi) 620 kPa (90 psi)
1.5 SLPM Plasma Gas :
25 SLPM
N Mono Purge :
2
10 SLPM
Compressed air
Nitrogen
generator
n/a
2
n/a
2
n/a
ISO 8573-1:2010
CLASS 8.4.3
Nitrogen
Generator :
620–750 kPa
(90–109 psi)
115 SLPM
Laboratory Facilities
Compressed air
POP and Accessories
(EGCM, Mono Air
Purge)
n/a
n/a
n/a
ISO 8573-1:2010 CLASS
1.4.3
POP Gas, EGCM/Mono
Air Purge :
450–600 kPa
(65–87 psi)
500 kPa (72.5 psi)
POP Gas :
25 SLPM
Organics Analysis :
1.5 SLPM,
Mono Air Purge :
10 SLPM
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