Speed - Renishaw ATOM Installation Manual

Ti interface:

Speed

20 µm system
0004 0020 0040
(5 µm) (1 µm) (0.5 µm)
10 10 10
10
10 10
10 10 8.1
10 10 6.75
9
10 4.5
10 8.1 4.05
10 6.48 3.24
10 4.5 2.25
10 3.37 1.68
4.2 0.84 0.42
40 µm system
0004 0020 0040
(10 µm) (2 µm) (1 µm)
20
20 20
20 20 20
20 20 16.2
20 20 13.5
20 18 9
20 16.2 8
20 12.96 6.48
20 9 4.5
6.74
20 3.36
8.4 1.68 0.84
Analogue speed
20 µm system – 10 m/s (-3dB)
40 µm system – 20 m/s (-3dB)
ATOM
linear installation guide
Maximum speed (m/s)
0100 0200 0400
(0.2 µm) (0.1 µm) (50 nm)
6.48 3.24 1.62
1.35
5.4 2.7
3.24 1.62 0.81
2.7 1.35 0.675
0.45
1.8 0.9
1.62 0.81 0.405
1.29 0.648 0.324
0.9 0.45 0.225
0.67 0.338 0.169
0.042
0.16 0.084
Maximum speed (m/s)
0100 0200 0400
(0.1 µm)
(0.4 µm) (0.2 µm)
3.25
12.96 6.48
10.8 5.4 2.7
6.48 3.24 1.62
5.4 2.7 1.34
3.6 1.8 0.9
0.8
3.24 1.62
2.58 1.296 0.648
1.8 0.9 0.45
0.338
1.34 0.676
0.32 0.168 0.084
1000 2000 4000
(20 nm) (10 nm) (5 nm)
0.648 0.324 0.162
0.54 0.27 0.135
0.324 0.162 0.081
0.27 0.135 0.068
0.18 0.09 0.045
0.162 0.081 0.041
0.13 0.065 0.032
0.09 0.045 0.023
0.068 0.034 0.017
0.017 0.008 0.004
1000 2000 4000
(40 nm) (20 nm) (10 nm)
1.296 0.648 0.324
1.08 0.54 0.27
0.648 0.324 0.162
0.54 0.27 0.136
0.36 0.18 0.09
0.324 0.162 0.082
0.26 0.13 0.064
0.18 0.09 0.046
0.136 0.068 0.034
0.034 0.016 0.008
Lowest recommended
counter input frequency
10KD 20KD
(MHz)
(2 nm) (1 nm)
0.0654 0.032
0.054 0.027
0.032 0.016
0.027 0.013
0.018 0.009
0.016 0.0081
0.013 0.0065
0.009
0.0045
0.0068 0.0034
0.0017 0.0008
Lowest recommended
counter input frequency
10KD 20KD
(MHz)
(4 nm) (2 nm)
0.013 0.064
0.108 0.054
0.064 0.032
0.026
0.054
0.036 0.018
0.032 0.0162
0.026 0.013
0.018 0.009
0.0136 0.0068
0.0034 0.0016
50
40
25
20
12
10
8
6
4
1
50
40
25
20
12
10
8
6
4
1
36