ACi interface:
Speed
20 µm system
Maximum speed (m/s)
0020
0040
0080
0100
(1 µm)
(0.5 µm)
(0.25 µm)
(0.2 µm)
6.5
6.5
6.5
5.8
6.5
6.5
4
3.2
–
–
–
–
6.5
4
2
1.6
–
–
–
–
4
2
1
0.8
–
–
–
–
40 µm system
Maximum speed (m/s)
0020
0040
0080
0100
(2 µm)
(1 µm)
(0.5 µm)
(0.4 µm)
13
13
13
11.6
13
13
8
6.4
–
–
–
–
13
8
4
3.2
–
–
–
–
8
4
2
1.6
–
–
–
–
ATOM
linear installation guide
0200
0400
1000
2000
(0.1 µm)
(50 nm)
(20 nm)
(10 nm)
3
–
–
–
–
1.6
–
–
–
0.35
0.13
0.065
–
0.8
–
–
–
0.18
0.06
0.03
0.4
–
–
–
–
0.12
0.04
0.02
0200
0400
1000
2000
(0.2 µm)
(0.1 µm)
(40 nm)
(20 nm)
6
–
–
–
–
3.2
–
–
–
0.7
0.26
0.13
–
1.6
–
–
–
0.36
0.12
0.06
0.8
–
–
–
–
0.24
0.08
0.04
Lowest recommended
counter input frequency
(MHz)
40
20
12
10
6
5
4
Lowest recommended
counter input frequency
(MHz)
40
20
12
10
6
5
4
32