Table of Contents
Laser Safety........................................................................ ii
Precautions........................................................................ xi
1-4 Connections ............................................................................................8
1-5 Installation ............................................................................................11
3-1 ZX-L Series ..........................................................................................31
4-2 Initial Display .....................................................................................111
4-3 RUN Mode .........................................................................................112
5-1 Error Displays.....................................................................................142
5-2 Setting Problems.................................................................................144
6-2 Dimensions .........................................................................................156
xiii