ZERO CHECK
Range and Integration Time
You must change the range setting from the default of LIMITED 1 nA to LIMITED 10 pA or to
AUTO. Otherwise you will have 100 fA resolution instead of the best 1 fA resolution possible.
Also change the High Resolution ADC Mode to PLC and Factor to 16. You will see +/- 3 fA
variation measurement result as shown in the previous slide.
Change SMU Range to
AUTO or LIMITED 10 pA
Change Integration Time to
16 PLC
6-13
Module 6
Low Current Measurement