Agilent Technologies B1500A Training Manual page 29

Semiconductor device analyzer
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Wrong Triaxial Hookup
If you use the Sense lines ...
CMU
SMU4
SMU3
SMU2
SMU1
GNDU
B1500A Rear View
This picture shows the triax cables connected to the right set of connectors which is wrong.
The 4 triax cables must be connected to the left set of connectors (FORCE).
You will likely see this type of erroneous response with clamping at 10 mA (no trace above 10 mA
even though compliance is set much higher). Also you may see the response with notches at 10 mA
level.
The effect is magnified when the SMU measurement ranging is set to AUTO.
This curve was produced using your training class MOS device and the IDVD setup.
No error was seen until the ranging was changed from FIXED 100 mA to AUTO. Then it was
evident that the cables were hooked up improperly.
Curves clamped at 10 mA level
5-9
Module 5
Basic Measurement

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