Agilent Technologies B1500A Training Manual page 89

Semiconductor device analyzer
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ZERO CHECK
Appendix: Using ASU
For Ultra Low Current Measurement
From HRSMU
Triax cable
Force
D-sub
Control cable
(control signal and Sense signal)
For ultra low current measurement, use ASU (atto sense/switch unit).
The HRSMU has an innate 1 fA measurement resolution. And the ASU extends it to 0.1 fA.
Note that the ASU must be connected to the HRSMU before turning on the B1500A.
Sense (optional)
Force
6-17
Module 6
Low Current Measurement

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