Agilent Technologies B1500A Training Manual page 108

Semiconductor device analyzer

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Low Current Gate Oxide Measurement

Fowler-Nordheim (FN) Plot

The Fowler-Nordheim (FN) plot is a log plot of oxide leakage in accumulation mode breakdown.

The plot shows a characteristic "arc" leading up to the rupture current.

This plot is a measurement result example of a MOS capacitor on a wafer. You cannot get this kind

of plot by measuring the class exercise MOS FET.

The MARKER is set to -27.590 mA. This is the point at which rupture of the gate oxide occurred.

The B1500A has the sweep abort function which automatically aborts sweep measurement when any

abnormal occurs.

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Module 6

Low Current Measurement

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