ZERO CHECK
Appendix: Using ASU
This slide shows the open measurement results with ASU and without ASU.
The ASU provides the 1 pA measurement range and the stable measurement results as shown.
The 1 pA range is disabled with the default setting. To enable the 1 pA range, set the ranging mode
to LIMITED 1 pA (1 pA limited auto ranging) or FIXED 1 pA (1 pA fixed range).
HRSMU+ASU
HRSMU
6-19
Module 6
Low Current Measurement