Agilent Technologies B1500A Training Manual page 109

Semiconductor device analyzer
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FOWLER-NORDHEIM PLOT
Measurement Page
A 3 second delay at the beginning of the measurement will be required. The SMU must initially step
from 0 to -5 V, a very large step. Fully guarded probes to within 2 mm of probe tip and fully guarded
chuck eliminated the need for delays at every measurement point. The only wait will be the initial 3
second hold time.
Negative sweep.
Accumulation mode.
Wait for 5 V initial step
6-37
Module 6
Low Current Measurement

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