Agilent Technologies B1500A Training Manual page 75
Semiconductor device
analyzer
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Also See for B1500A:
- Self-paced training manual (225 pages) ,
- User manual (208 pages) ,
- Training manual (128 pages)
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Low Current Measurement
What is possible?
Measurements below 10 fA at the wafer level
Repeatability within a few fA
Speeds less than 1 minute for subthreshold sweep
Making wafer level measurements to fA levels is easy and routine using proper measurement
procedures on a low noise probe station. This module explains how.
6-3
Module 6
Low Current Measurement
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