Agilent Technologies B1500A Training Manual page 80

Semiconductor device analyzer

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Low Current

Calibration & Zero Cancel

Click Calibration button to open the Calibration window.

SMU calibration is performed on the SMU Calibration tab screen. Specify the modules for

calibration by checking the left check box and click Start Calibration button to start calibration. If

ASU (atto sense/switch unit) is connected and 1 pA range is used for measurement, check Full Range

Calibration check box before clicking Start Calibration button.

SMU zero cancel is performed on the SMU Zero Cancel tab screen. Specify the modules for zero by

checking the left check box and click Measure... button to start SMU zero. If ASU is connected and

1 pA range is used for measurement, check Full Range check box before clicking Measure... button.

To enable the auto calibration function, check the Enable Auto Calibration check box on the SMU

Calibration tab screen.

Calibration

6-8

Module 6

Low Current Measurement

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