Mitsubishi Electric MELSERVO-J3 Series Manual page 345

Part 5: Common Reference Material
(8) Compliance with SEMI-F47 standard
The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag
immunity test" of MR-J4 series.
This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in the
capacitor in case that an instantaneous power failure occurs during operation.
(a) Parameter setting
Setting [Pr. PX25] and [Pr. PX28] as follows will enable SEMI-F47 function.
Parameter
PX25
PX28
Enabling SEMI-F47 function will change operation as follows.
1) The voltage will drop in the control circuit power with "Rated voltage × 50% or less". 200 ms later,
[AL. 10.1 Voltage drop in the control circuit power] will occur.
2) [AL. 10.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Table 5.8 Voltages which trigger [AL. 10.2 Voltage drop in the main circuit power]
POINT
The control circuit power supply of the MR-J4-_B_(-RJ) servo amplifier can be
possible to comply with SEMI-F47 standard. However, a back-up capacitor may
be necessary for instantaneous power failure in the main circuit power supply
depending on the power supply impedance and operating situation.
The control circuit power supply of the MR-J4W_-_B 200 W or more servo
amplifier can comply with SEMI-F47 standard. However, a back-up capacitor
may be necessary for instantaneous power failure in the main circuit power
supply depending on the power supply impedance and operating situation. Be
sure to check them by testing the entire equipment using actual machines.
Use a 3-phase for the input power supply of the servo amplifier. Using a 1-phase
100 V AC/200 V AC for the input power supply will not comply with SEMI-F47
standard.
The external dynamic brake cannot be used for compliance with SEMI-F47
standard. Do not assign DB (Dynamic brake interlock) in [Pr. PD07] to [Pr.
PD09]. Failure to do so will cause the servo amplifier to become servo-off when
an instantaneous power failure occurs.
It is not available with MR-J4W2-_B servo amplifiers.
Be sure to perform actual machine tests and detail checks for power supply
instantaneous power failure of SEMI-F47 standard with your equipment.
Setting value
_ 1 _ _ Enable SEMI-F47 function selection.
Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power]
200
occurrence.
Servo amplifier
MR-J4-10B(-RJ)
to
MR-J4-700B(-RJ)
MR-J4-11KB(-RJ)
to
MR-J4-22KB(-RJ)
MR-J4-60B4(-RJ)
to
MR-J4-22KB4(-RJ)
MR-J4W2-22B/-44B/-
77B/-1010B
Description
Bus voltage which triggers alarm
158 V DC
200 V DC
380 V DC
DC 158 V
5 - 160