Agilent Technologies B1500A Self-Paced Training Manual page 151

Semiconductor device analyzer easyexpert software
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To Perform Compensation and Correction
Calibration button
Advanced Options...
Calibration
The MFCMU is equipped with the error correction function used to realize accurate impedance
measurements. The correction function minimizes the effects of the error elements in the
extension cables and the DUT interface such as manipulator and probe card.
•Phase compensation: Corrects phase error caused by extending measurement cables.
•Open correction: Corrects for stray admittance. Effective for high impedance measurements.
•Short correction: Corrects for residual impedance. Effective for low impedance measurements.
•Load correction: Corrects any error by using the working standard (load standard).
Click the Calibration button to open the Calibration window. And click the CMU calibration tab on
the window to perform the compensation and correction data measurement.
•To measure the phase compensation data, open the measurement terminals at the end of the
device side and click the Measure... button.
•To measure the open correction data, open the measurement terminals at the end of the device
side and click the Measure... button.
•To measure the short correction data, connect the measurement terminals together at the end of
the device side and click the Measure... button.
•To measure the load correction data, connect the load standard that has the reference value or
calibration value. Then, click the Measure... button.
For details of the error correction (CMU calibration) and the Advanced Options, see online help or
. The Advanced Options window is used for the compensation/correction data
User's Guide
measurement setup.
5-44

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