Agilent Technologies B1500A Self-Paced Training Manual page 14

Semiconductor device analyzer easyexpert software
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ASU
C meter Hcur
C meter Hpot
HRSMU Force
HRSMU control
C meter Lcur
C meter Lpot
HRSMU Force
HRSMU control
The high-resolution SMU (HRSMU) has an innate 1 fA & 0.5 mV measurement resolution. The
optional ASU extends the HRSMU measurement resolution to 0.1 fA.
The ASU has another feature, built-in switching capability. It can switch between the SMU and an
auxiliary input (AUX input, two BNC).
If the Agilent 4284A LCR meter is connected to the AUX inputs, the ASU can switch between the
low current and CV measurements. Then connect a wire between the CMU return terminals of
ASUs to make the return path of measurement current. This is effective for accurate capacitance
measurement. However, you need to perform capacitance compensation by yourself.
• 100 aA level sensing
• Channel switching
• C measurements
• PG for charge pumping
Return path for C meter
Hcur/Hpot or Force
ASU1
Source
Lcur/Lpot or
Force
ASU2
Source
1-11

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