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T A B L E O F C O N T E N T S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I
F I G U R E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V I
A B O U T T H I S M A N U A L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V I I
1 .
I N T R O D U C T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1
PRODUCT OVERVIEW ................................................................................................................................................................. 1
1.1.1
MOLBLOC FLOW ELEMENTS ........................................................................................................................................................... 1
1.1.1.1
MOLBLOC-L FLOW ELEMENT....................................................................................................................................................... 1
1.1.1.2
MOLBLOC-S FLOW ELEMENT ...................................................................................................................................................... 1
1.2
SPECIFICATIONS ......................................................................................................................................................................... 2
1.2.1
GENERAL SPECIFICATIONS ............................................................................................................................................................. 2
1.2.2
REFERENCE PRESSURE TRANSDUCER (RPT) SPECIFICATIONS .............................................................................................. 2
1.2.2.1
UPSTREAM AND DOWNSTREAM RPTS ...................................................................................................................................... 2
1.2.2.2
DIFFERENTIAL RPT (MICRORANGE OPTION)............................................................................................................................ 3
1.2.3
TEMPERATURE MEASUREMENT SPECIFICATIONS...................................................................................................................... 3
1.2.4
FLOW MEASUREMENT SPECIFICATIONS....................................................................................................................................... 3
1.2.4.1
MOLBLOC-L .................................................................................................................................................................................... 3
1.2.4.1.1
MOLBLOC-L FLOW MEASUREMENT SPECIFICATIONS, MICRORANGE OPTION ............................................................. 4
1.2.4.1.2
MOLBLOC-L PRESSURE DEPENDENT CALIBRATION TYPES............................................................................................. 4
1.2.4.1.3
MOLBLOC-L RANGES WITH LOW PRESSURE CALIBRATIONS........................................................................................... 6
1.2.4.1.4
MOLBLOC-L RANGES WITH HIGH PRESSURE CALIBRATIONS.......................................................................................... 7
1.2.4.1.5
MOLBLOC-L DIMENSIONS ....................................................................................................................................................... 8
1.2.4.2
MOLBLOC-S .................................................................................................................................................................................... 9
1.2.4.2.1
MOLBLOC-S RANGES............................................................................................................................................................... 9
1.2.4.2.2
MOLBLOC-S PRESSURE DEPENDENT CALIBRATION TYPES .......................................................................................... 11
1.2.4.2.3
MOLBLOC-S DIMENSIONS ..................................................................................................................................................... 12
1.2.5
FRONT AND REAR PANELS............................................................................................................................................................ 13
1.2.5.1
FRONT PANEL .............................................................................................................................................................................. 13
1.2.5.2
REAR PANEL ................................................................................................................................................................................ 14
2 .
I N S T A L L A T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 5
2.1
UNPACKING AND INSPECTION ............................................................................................................................................... 15
2.1.1
REMOVING FROM PACKAGING...................................................................................................................................................... 15
2.1.2
INSPECTING CONTENTS ................................................................................................................................................................. 15
2.2
SITE REQUIREMENTS ............................................................................................................................................................... 15
2.3
INITIAL SETUP............................................................................................................................................................................ 16
2.3.1
PREPARING FOR OPERATION ....................................................................................................................................................... 16
2.3.2
POWER CONNECTION ..................................................................................................................................................................... 16
2.3.3
MOLBOX RFM TO MOLBLOC CONNECTION................................................................................................................................. 16
2.3.4
GAS SUPPLY AND FLOWPATH CONNECTIONS........................................................................................................................... 17
2.3.5
VACUUM SUPPLY (MOLBLOC-S ONLY) ........................................................................................................................................ 18
2.3.6
COMMUNICATIONS CONNECTIONS .............................................................................................................................................. 18
2.4
POWER UP AND VERIFICATION .............................................................................................................................................. 18
2.4.1
POWER UP......................................................................................................................................................................................... 18
2.4.2
CHECK PROPER PRESSURE MEASUREMENT OPERATION .......................................................................................... 19
2.4.3
CHECK PROPER TEMPERATURE MEASUREMENT OPERATION.......................................................................................... 19
2.4.4
LEAK CHECK..................................................................................................................................................................................... 19
2.4.5
CHECK/SET SECURITY LEVEL ....................................................................................................................................................... 20
2.5
ADDITIONAL PRECAUTIONS TO TAKE BEFORE MAKING FLOW MEASUREMENTS ....................................................... 20
2.6
SHORT TERM STORAGE........................................................................................................................................................... 20
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© 1998-2007 DH Instruments, a Fluke Company
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