Table 4. Molbloc-S Flow At Various Molbloc Upstream Pressures; Table 5. Minimum Molbloc-S Critical Flow (Slm) At Various Molbloc-S Downstream Pressures - Fluke MOLBOX RFM Operation And Maintenance Manual

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
molbloc-S
DESIGNATO K
F
R [sccm/kPa]
50
5E1-S
1E2-S 100
2E2-S 200
500
5E2-S
1 000
1E3-S
2E3-S 2 000
5E3-S 5 000
10 000
1E4-S
[1] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values
will generally be higher; for example, the flow values for a given molbloc and upstream pressure are
approximately 7% higher when expressed in slm @ 20°C. Flow values at a given pressure may vary by up to
2% due to flowpath machining tolerances.
[2] Flow values in table are valid only when critical flow is established.
[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)
downstream of molbloc-S (no vacuum).

Table 5. Minimum molbloc-S Critical Flow (slm) at Various molbloc-S Downstream Pressures

MINIMUM molbloc-S CRITICAL FLOW [SLM @ 0°C] WITH molbloc DOWNSTREAM PRESSURE OF:
≤ 5
molbloc-S
kPa
DESIGNATO
(0.7
R
psia)
[2]
5E1-S 1
[2]
1E2-S 2
[2]
4
2E2-S
[2]
10
5E2-S
[2]
1E3-S 20
[2]
2E3-S 40
[2]
100
5E3-S
[2]
1E4-S 200
[1] When volumetrically based mass flow units with reference temperatures other than 0 °C are used, flow values
will generally be higher; for example, the flow values for a given molbloc and upstream pressure are
approximately 7 % higher when expressed in slm @ 20 °C. Flow values at a given pressure may vary by up to
2 % due to flowpath machining tolerances.
[2] Limited by 20 kPa minimum calibration pressure rather than back pressure ratio.
© 1998-2007 DH Instruments, a Fluke Company

Table 4. molbloc-S Flow at Various molbloc Upstream Pressures

FLOW [slm @ 0°C] WHEN molbloc-S UPSTREAM PRESSURE IS:
20 kPa 50 kPa 100 kPa
(3psia) (7 psia) (15 psia)
1 2.5
2 5
4 10
10 25
20 50 100
40 100 200
100 250 500
200 500 1 000
10 25 50 100
kPa kPa kPa kPa
(1.5 (3.5 (7
psia) psia) psia) psia)
1.7 3.4 4.7
3.4 5.9 8.4
5.9 9.8 16
12 20 37
[2]
20 39 69
[2]
40 73 131
[2]
100 173 317
[2]
200 347 615 1 173
Page 10
Minimum 150 kPa
without (22 psia)
[3
vacuum
]
5 7.7 7.5
10 15 15
20 28 30
50 67 75
129 150
248 300
596 750
1 173 1 500
110 125 150
kPa kPa kPa
(15 (16 (18 (22
psia) psia) psia)
7.7 8.4 9.4
15 16 18
28 31 34
67 72 80
129 139 154
248 268 298
596 646 746
1 273 1 442 1 741
[1][2]
200 kPa 250 kPa 500 kPa
(30 psia) (36 psia) (70 psia)
10 12.5 25
20 25 50
40 50 100
100 125 250
200 250 500
400 500 1 000
1 000 1 250 2500
2 000 2 500 5 000
[1]
200 250 300
kPa kPa kPa
(30 (36 (44
psia) psia) psia)
11 14 17
21 27 33
40 51 63
95 122 149 179
184 239 294 349
358 468 578 687
871 1 145 1 420 1 694
2 240 2 789 3 338
20
38
74