Page 1 RFM™ (Ver 1.10 and Higher) Reference Flow Monitor Operation and Maintenance Manual © 1998-2007 DH Instruments, a Fluke Company...
Page 2 Products described in this manual are manufactured under international patents and one or more of the following U.S. patents: 5,142,483, 5,257,640, 5,331,838, 5,445,035. Other U.S. and international patents pending. DH Instruments, DH, DHI, molbox, molbox RFM, molbloc, molbloc-L, molbloc-S and CalTool are trademarks, registered and otherwise, of DH Instruments, a Fluke Company.
Page 3: Table Of Contents
INITIAL SETUP.................................... 16 2.3.1 PREPARING FOR OPERATION ............................... 16 2.3.2 POWER CONNECTION ..................................16 2.3.3 MOLBOX RFM TO MOLBLOC CONNECTION..........................16 2.3.4 GAS SUPPLY AND FLOWPATH CONNECTIONS........................... 17 2.3.5 VACUUM SUPPLY (MOLBLOC-S ONLY) ............................18 2.3.6 COMMUNICATIONS CONNECTIONS .............................. 18 POWER UP AND VERIFICATION ..............................
Page 4 MOLBLOC-L AND MOLBLOC-S SIZE AND RANGE DESIGNATIONS ..................70 3.4.9 [RES]........................................71 [SETUP]....................................... 72 3.5.1 <1FLOWU>......................................72 3.5.2 <2PRESU>......................................73 3.5.3 <3TEMPU> ......................................73 3.5.4 <4MOLBLOC>....................................74 3.5.5 <5STAB> ......................................74 3.5.6 <6ADJ>....................................... 75 © 1998-2007 DH Instruments, a Fluke Company Page II...
Page 5 5.2.5 RPT CALIBRATION/ADJUSTMENT PROCEDURE WITHOUT USING CALTOOL FOR RPTS SOFTWARE ......141 OHMIC MEASUREMENT SYSTEM VERIFICATION........................ 142 RELOADING EMBEDDED SOFTWARE INTO MOLBOX RFM FLASH MEMORY..............143 RELOADING MOLBLOC EEPROM FILE..........................144 Page III © 1998-2007 DH Instruments, a Fluke Company...
Page 7: Tables
Table 5. Minimum molbloc-S Critical Flow (slm) at Various molbloc-S Downstream Pressures ....10 Table 6. molbloc-S Calibration Types ......................11 Table 7. molbox RFM Parts List......................... 15 Table 8. Summary of molbox RFM Direct Function Key Operations............29 Table 9. Available molbloc-L Gases ......................32 Table 10. Available molbloc-S Gases ......................33 Table 11.
Page 8 CHECKING OFFSET AND STABILITY molbloc-S operation ..........52 Figure 11. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR ON....92 Figure 12. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR OFF ....92 Figure 13. Status Byte Register ....................... 130 Figure 14.
Page 9: A B O U T T H I S M A N U Al
RFM behavior based on the symptoms of that behavior. Certain words and expressions have specific meaning as they pertain to molbox RFM. Section 8 is useful as a quick reference for exact definition of specific words and expressions as they are used in this manual.
Page 11: I N T R O D U C T I On
SELF PROTECTION functions as well as a gas purge routine. molbox RFM provides a local user interface via a front panel key pad and display and includes advanced on-board functions. Remote communication capability is supported with RS232 and IEEE-488 interfaces.
Page 12: Specifications
Absolute measurements: ± 0.05 % FS for one year Accuracy Differential measurements: ± (20 Pa + 0.05 % ΔΡ). Taring sequence eliminates zero error on measurement of difference between the two RPTs. © 1998-2007 DH Instruments, a Fluke Company Page 2...
Page 13: Differential Rpt (Microrange Option)
1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: aximum change in zero and span over specified time period for typical molbox RFM and molbloc used under typical conditions. As stability can only be predicted, stability for a specific molbox RFM should be established from experience.
Page 14: Molbloc-L Flow Measurement Specifications, Microrange Option
1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox RFM and molbloc used under typical conditions. As stability can only be predicted, stability for a specific molbox RFM should be established from experience.
Page 15: Table 1. Molbloc-L Pressure Dependent Calibration Types
325 and 525 kPa absolute (48 (non-N2 gases only) to 76 psia) Differential pressure values are nominal and may vary by up to 15 % with the actual molbloc used. Page 5 © 1998-2007 DH Instruments, a Fluke Company...
Page 16: Molbloc-L Ranges With Low Pressure Calibrations
5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful. [1] Due to low vapor pressure, only downstream calibration type is available. © 1998-2007 DH Instruments, a Fluke Company Page 6...
Page 17: Molbloc-L Ranges With High Pressure Calibrations
5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful. [2] The operating pressure range is greater than the vapor pressure value for the gas. Page 7 © 1998-2007 DH Instruments, a Fluke Company...
Page 18: Molbloc-L Dimensions
48.00 (1.890) SQ 68.84 (2.750) 80.00 (3.150) 80.00 (3.150) 19.06 (0.750) 28.00 (1.102) 28.00 (1.102) 124.00 (4.881) 157.00 (6.181) 164.00 (6.458) 1/4 in. VCR M 1/4 in. VCR M 1/2 in. VCR M © 1998-2007 DH Instruments, a Fluke Company Page 8...
Page 19: Molbloc-S
Precision: Combined linearity, hysteresis, repeatability. Stability: Maximum change in zero and span over specified time period for typical molbox RFM and molbloc used under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox RFM should be established from experience.
Page 20: Table 4. Molbloc-S Flow At Various Molbloc Upstream Pressures
7 % higher when expressed in slm @ 20 °C. Flow values at a given pressure may vary by up to 2 % due to flowpath machining tolerances. [2] Limited by 20 kPa minimum calibration pressure rather than back pressure ratio. © 1998-2007 DH Instruments, a Fluke Company Page 10...
Page 21: Molbloc-S Pressure Dependent Calibration Types
(choked) flow (see Section 3.1.2). Page 11 © 1998-2007 DH Instruments, a Fluke Company...
Page 22: Molbloc-S Dimensions
40 mm diameter ISO-KF nipple is supplied with 5E3-S and 1E4- S molblocs. [2] Default connector type listed. Additional upstream connector options may be available. Contact your DHI Sales Representative details. © 1998-2007 DH Instruments, a Fluke Company Page 12...
Page 23: Front And Rear Panels
SOFT ON/OFF key. 1. Display 2. Multi-function Keypad P 3. Remote Communication Indicator 4. SOFT ON/OFF Key and Indicator Figure 1. molbox RFM Front Panel Page 13 © 1998-2007 DH Instruments, a Fluke Company...
Page 24: Rear Panel
4. COM1 (RS232) connector for host communications 5. Electrical connection to molbloc 6. COM2 (RS232) connector for communications with an external device 7. Product label (on bottom of case) Figure 2. molbox RFM Rear Panel © 1998-2007 DH Instruments, a Fluke Company Page 14...
Page 25: I N S T A L L A T I O
The front feet are extendible so that the unit can be inclined for easier viewing. The molbox RFM can also be mounted in a standard 19-in. rack mount using the optional rack mount kit (P/N 401465). For additional information, contact your DHI Sales Representative.
Page 26: Initial Setup
85 to 264 VAC, 50 to 60 Hz, 22 VA max. consumption. molbox RFM is always powered and active when power is supplied through the rear panel power connector. The front panel ON/OFF key controls a SOFT ON/OFF (see Section 3.3.3).
Page 27: Gas Supply And Flowpath Connections
Care should also be taken to make sure that the pressure and flow supplied to the molbloc are always low enough to avoid over pressuring the molbox RFM RPTs (see Sections 1.2.2, 3.1.6). If a DUT upstream of the molbloc is operated at high pressure, a pressure reducing regulator should be connected between the DUT and the molbloc to ensure that even momentary high pressure spikes do not reach the molbox RPTs.
Page 28: Vacuum Supply (Molbloc-S Only)
2.4.1 POWER UP Connect the molbox RFM power cable to an electric supply of 85 to 264 VAC (47 to 440 Hz). Observe the front panel display as molbox RFM initializes, error checks, calibrates its internal ohmic measurement system and goes to the main run screen (see Section 3.2). The top left side of the main run screen should display a flow value near zero or <BPR HI>.
Page 29: Check Proper Pressure Measurement Operation
MEASUREMENT function and service may be required. 2.4.4 LEAK CHECK It is recommended that a new molbox RFM be leak checked at start-up to assure that no internal leaks developed during shipping and handling. Run the molbox RFM on-board INTERNAL LEAK CHECKING function (see Section 3.4.5).
Page 30: Check/Set Security Level
Vent the molbox RFM pressure ports. • Disconnect the power supply. When molbox RFM will NOT be used for some time, it may be left powered. Use the SOFT ON/OFF key to turn OFF the display. © 1998-2007 DH Instruments, a Fluke Company...
Page 31: O P E R A T I O
Most molbox RFM settings, such as gas, units, K factor, etc., are common to both molbloc-L and molbloc-S operation. Changes made to these settings while operating one type of molbloc will still be in effect when the other type of molbloc is connected.
Page 32: Flow Ready/Not Ready Indication
BPR limits, when the molbloc-S downstream pressure is known: In actual operation, molbox RFM calculates the Re and BPR ratio and provides an indication of whether the BPR is adequate for measurements to be made.
Page 33: Soft [On/Off] Key
RFM is equipped with a SOFT [ON/OFF] key and indicator LED on the bottom left hand corner of the front panel. The purpose of the SOFT ON/OFF key is to put molbox RFM into a dormant mode in which the display is turned OFF but power is still supplied and OVERPRESSURE functions are still active.
Page 34: Reference Pressure Transducer (Rpt) Overpressure
To determine if a molbox RFM is equipped with the microrange option, check the model number on the product label on the bottom of the molbox RFM case. If the model number includes a “-M”, the microrange option is installed.
Page 35: Main Run Screen
3. OPERATION MAIN RUN SCREEN The molbox RFM MAIN run screen is its home display that is reached upon power up and from which other functions and menus are accessed. It is the top level of all menu structures. It indicates the current measured flow as well as a variety of additional information, if desired.
Page 36: Molbloc-S Operation
RFM™ OPERATION AND MAINTENANCE MANUAL molbox RFM has a SCREEN SAVER function that causes the display to dim if NO key is pressed for 10 minutes. Pressing a key restores full power to the display. The screen saver activation time can be changed or screen saving can be completely suppressed (see Section 3.6.5.1).
Page 37: Manual Operation
(see Section 4). 3.3.1 KEYPAD LAYOUT AND PROTOCOL Molbox RFM has a 4 x 4 keypad for local operator access to direct functions, function menus and for data entry. The Function/Data keys allow very commonly used functions to be accessed directly from the MAIN run screen by a single keystroke.
Page 38: Sounds
RFM is equipped with a SOFT [ON/OFF] key and indicator LED on the bottom left hand corner of the front panel. The purpose of the SOFT ON/OFF key is to put molbox RFM into a dormant mode in which the display is turned OFF but power is still supplied and OVERPRESSURE functions are still active.
Page 39: Direct Function Keys
3.4.1 PURPOSE To cause the flow value calculated by molbox RFM to be multiplied by a factor, K. Generally used to apply a test device’s gas correction factor used when a test device is calibrated with a gas other than its normal process gas.
Page 40 SF6 flow x 0.970 = equivalent SiH4 flow for the MFC The K function in molbox RFM allows a gas conversion factor to be entered by which flow values measured by molbox RFM will be multiplied. In this example, 0.970 would be entered as K so that the values indicated by molbox RFM when SF6 is flowing through the molbloc simulate the flow of SiH4 for that manufacturer's MFC.
Page 41: Gas]
3.4.2 [GAS] PURPOSE To specify the gas that is currently flowing through the molbloc so that molbox RFM uses the correct gas property values in its flow calculations. PRINCIPLE molbox RFM calculates the flow through a molbloc from: •...
Page 42: Molbloc-L Operation
The selected gas is always displayed in the upper right hand corner of the MAIN run screen. The gas selected on molbox RFM should always be the gas that is flowing through the molbloc. molbloc/molbox does not use K factors or gas conversion factors between gases.
Page 43: Molbloc-S Operation
It is different from the relative humidity value, which is usually expressed as a percentage. Typical values of W are between zero and 0.06. molbox RFM does not accept an entry for W greater than 0.1.
Page 44: Unit]
RFM also supports conversions to a variety of other flow units of measure. The UNIT function allows the user to select the flow unit of measure in which molbox RFM displays measured flow. These include units of mass flow, including volumetrically based mass flow units (i.e., sccm) ©...
Page 45: Mass Flow Vs. Volume Flow
RFM can also display the measured flow in two different units of measure simultaneously (see Section 3.4.6.5). OPERATION The UNIT function is used to set the unit of measure of the molbox RFM flow display. To change the flow unit of measure press [UNIT]. 1sccm 2slm 3uccm...
Page 46: Volumetrically Based Mass Flow Units
Therefore, to accurately predict volume flow at another point in the system, molbox RFM must calculate volume flow based on the mass flow through the molbloc and the gas pressure and temperature at that other point, not at the molbloc.
Page 47: Volumetrically Based Mass Flow Units At Various Reference Temperatures (Uxxx)
Volumetrically based mass flow units, including user units (uxxx) and perfect units (pxxx), are discussed further in Section 3.4.3.2. 3.4.3.4 VOLUME FLOW UNITS (VLM) See Section 3.4.3.1 before using volume flow units. Volume flow is sometimes referred to as actual flow. Page 37 © 1998-2007 DH Instruments, a Fluke Company...
Page 48: Customizing Flow Units Available Under The Unit Function
The UNIT function provides a choice of six different flow units of measure. The units that are available by default are the six indicated in Section 3.4.3. However, molbox RFM supports many other units. These other units can be made available for selection by customizing the UNIT function.
Page 49: Tare]
(see Section 3.4.4.1). • PURGE function: To purge the molbloc connecting lines and molbox RFM internal volume of a first gas with a second gas by flowing the second gas through the molbox RFM (see Section 3.4.4.2). •...
Page 50: 1Tare
RFM™ OPERATION AND MAINTENANCE MANUAL • AUTOZ function: To periodically offset the molbox RFM RPTs relative to a reference pressure value in order to compensate for possible changes in the RPT zero between full recalibrations (see Section 3.4.4.4). •...
Page 51: Figure 5. Molbox Rfm Internal Pneumatic Schematic - Taring, Upstream Molbloc-L Operation
3. OPERATION When the TARE function is activated, molbox RFM’s internal valves operate to pneumatically connect together the two absolute transducers, and both legs of the microrange option differential transducer if present, at the molbloc operating pressure. The user can select whether this pressure is the upstream or...
Page 52 RPT malfunction, molbox RFM checks the tare values before they are activated and displays warnings when appropriate. In the most extreme case, molbox RFM will not allow the tare value to be activated. The limits checked and their consequences are as follows:...
Page 53: Molbloc-S Operation
RPTs, and the average of the two readings is used as the measured molbloc upstream pressure. To take advantage of this RPT averaging, the molbox RFM must be in either BPR OFF or Auto BPR mode (see Section 3.6.9).
Page 54: 2Purge
<2Purge> PURPOSE To purge the lines between the molbloc and the molbox RFM and the internal molbox RFM volumes of one gas with another gas by setting up an internal valving configuration in which gas flows through the molbox RFM.
Page 55: Figure 7. Molbox Rfm Internal Pneumatic Schematic - Purging
It is also important to purge the molbox RFM itself which, since there is normally no flow through it, may trap and hold the old gas.
Page 56: 3Leak Check
RFM and/or the system to which it is connected for leaks. PRINCIPAL molbox RFM is used both as a tool to accurately measure unknown flow values and as a calibration standard to calibrate other devices by comparison. Leaks within the molbox RFM pneumatic circuit can cause erroneous flow measurements.
Page 57: Leak Check Molbox
OPERATION Press [TARE] and select <3leak check>, <1molbox>. If the molbox RFM has a microrange option, microrange RPT <1active> or <2bypassed> must be selected to proceed (see Section 3.1.5). The next display is:...
Page 58: Figure 8. Molbox Rfm Internal Pneumatic Schematic - Leak Check Molbox
RPT reading. Leak check count down in seconds. molbox RFM counts down for 60 seconds while monitoring the ratio of the two pressures and then determines whether an internal leak was present. A significant leak in a pressure isolation valve or a bypass valve between the two channels will cause the ratio between the two pressures to vary.
Page 59: Leak Check System
Failures in the system leak check do not normally indicate defects in the molbox RFM or molbloc itself. The molbox leak check is used to identify molbox RFM failures.
Page 60: Figure 9. Molbox Rfm Internal Pneumatic Schematic - System Leak Check - Checking Offset And Stability Molbloc-L Operation
(downstream of the molbloc and the DUT if the molbloc/molbox is being used to test another device). Using the molbox RFM display to read the pressure set the pressure to the normal operating pressure. FOR SYSTEMS WITH MASS FLOW CONTROLLERS (MFCs):...
Page 61 3. OPERATION After 30 seconds, if the stability check is not passed, molbox RFM displays: Leak is too large to • If the pressure was not stable: continue • Temp change was too If the molbloc temperature change was too great: great to find leaks •...
Page 62: Figure 10. Molbox Rfm Internal Pneumatic Schematic - System Leak Check - Checking Offset And Stability Molbloc-S Operation
RFM™ OPERATION AND MAINTENANCE MANUAL To run the leak test, select <1run>. molbox RFM actuates internal valves to connect the upstream and downstream RPTs together, so they are both measuring an equal system pressure. (see Figure 10). 1. High Isolation: Open 2.
Page 63: 4Autoz
3.4.4.4 <4AutoZ> PURPOSE To offset the molbox RFM absolute reference pressure transducers (RPTs) relative to a reference value in order to compensate for possible changes in RPT zero between full recalibrations. Improper use of the AutoZ function can cause out of tolerance pressure measurements.
Page 64 PRINCIPAL AutoZ Purpose and Principle The main component of the change over time of the molbox RFM RPTs is change in zero or offset, independent of span. Offsetting or “rezeroing” molbox RFM RPTs relative to a reference between recalibrations allows measurement uncertainty specifications to be maintained with less frequent full calibrations.
Page 65: Edit Autoz
• Select <2view> to view the current values of P for the two RPTs. offset should be zero when the molbox RFM is new or has just been calibrated. offset • Select <3edit> to edit the values of Poffset. The value of P is always displayed and entered in Pascal (Pa).
Page 66: Run Autoz
When AutoZ is run, the molbox RFM internal valves are actuated to connect both molbox RPTs to the Hi port on the molbox RFM rear panel (see Figure 21 in Section 5.2.4.1). Be sure the Hi port is fully open to atmosphere when running AutoZ.
Page 67 RFM and the RPMx RS-232 interfaces must be set up properly (see Section 3.6.6.1). If, the molbox RFM is unable to locate an RPM ON COM2 when running AutoZ by COM2, it times out after 6 seconds and displays an error message.
Page 68: 5Bpr> (Molbloc-S Operation Only)
RFM™ OPERATION AND MAINTENANCE MANUAL If molbox RFM is able to communicate with an RPMx on its COM2 port, the display is: Real time reading (without head correction) of upstream (1, Hi) RPT in unit of measure on line 2.
Page 69: P&T] (Pressure And Temperature)
RPTs, depending on which BPR mode is used (see Section 3.6.9). When molbox RFM is in a valve state called BPR OFF, the molbloc-S downstream pressure is not measured and both RPTs are used to measure the molbloc-S upstream pressure.
Page 70 To leave the P&T function and return to the MAIN run screen, press [ESCAPE]. To change the pressure and/or temperature unit of measure, see Sections 3.5.2 and 3.5.3. © 1998-2007 DH Instruments, a Fluke Company Page 60...
Page 71: Display]
3. OPERATION 3.4.6 [DISPLAY] PURPOSE To select, from a variety of choices, the information that is displayed in the molbox RFM main run display. PRINCIPLE molbox RFM supports a variety of ADVANCED FLOW MEASUREMENT functions that are generally displayed on the second (bottom) line of the molbox RFM display. In summary, the...
Page 72: 1Rate
(see Sections 3.1.3). The RATE DISPLAY only causes the current rate of change to be displayed and has NO affect on the stability setting or the Ready/Not Ready condition. © 1998-2007 DH Instruments, a Fluke Company Page 62...
Page 73: 2Avg> (Average)
Pressing [+/-] toggles between the MAIN run AVERAGE screen and the instantaneous values AVERAGE screen. The instantaneous AVERAGE screen is: Instantaneous flow value at molbox RFM’s normal integration rate. Countdown in seconds until completion of on- * 101.59 sccm...
Page 74: Hi/Lo
99:59:59. Edit the totalizing period as desired. Pressing [ENTER] returns to the MAIN run screen with the TOTALIZER DISPLAY active. With the TOTALIZER DISPLAY active the MAIN run screen is: © 1998-2007 DH Instruments, a Fluke Company Page 64...
Page 75: Table 12. Flow Units And Corresponding Total Mass Or Volume Units
Press [ENTER] to start totalizing. The elapsed time counter starts and the total mass or volume begins to accumulate. Totalizing continues until the set totalize period is complete. When the totalizing period is complete, molbox RFM sounds three beeps and displays the totalizing complete screen in which the total flow or volume and elapsed totalizing time are frozen with totalizing time NOT flashing.
Page 76: 5Unit
To go to a DISPLAY other than UNIT, press [DISPLAY] and make a new DISPLAY choice. 3.4.6.6 <6DEV> PURPOSE To activate the DEVIATION DISPLAY and/or edit the deviation target. See Section 3.4.6, PRINCIPLE. © 1998-2007 DH Instruments, a Fluke Company Page 66...
Page 77: 7Freeze
To activate the FREEZE DISPLAY. See Section 3.4.6, PRINCIPLE. OPERATION To activate the FREEZE DISPLAY press [DISPLAY] and select <7freeze>. Selecting <7freeze> returns to the MAIN run screen with the FREEZE DISPLAY active. Page 67 © 1998-2007 DH Instruments, a Fluke Company...
Page 78: 8Clean
F 99.24 default when FREEZE DISPLAY is first activated). Pressing [ENTER] causes the current flow measured by molbox RFM to be captured and displayed. If the flow measurement unit is changed while the FREEZE DISPLAY is active, the FREEZE value defaults back to zero.
Page 79 Automatic microrange ON is indicated by an <m> in the microrange status character of the main run screen. If molbox RFM is not equipped with the microrange option, a 5 second message indicates that the microrange option is not installed.
Page 80: Molbloc]
EEPROM each time it powers up. However, if the molbloc connected to the molbox is changed without turning the molbox RFM OFF and back ON, the new molbloc and the previous molbloc’s calibration information will continue to be used.
Page 81: Res]
3.4.9 [RES] PURPOSE To set the resolution of molbox RFM’s display of the flow through the molbloc and other flow display and entry values. PRINCIPLE The resolution with which the flow measured by molbox RFM is displayed can be adjusted. This feature can be used to reduce the resolution when lower precision measurements are being made and additional digits might confuse or distract the operator.
Page 82: Setup]
(e.g., quantities shown by the [DISPLAY] functions). [SETUP] PURPOSE The [SETUP] key accesses a menu of commonly used molbox RFM functions and features that do NOT have direct function keys. These functions include: <1flowU> To customize the flow unit choices available under [UNIT] (see Sections 3.5.1 and 3.4.3).
Page 83: 2Presu
<2presU> PURPOSE To select/change the unit of measure in which molbox RFM displays pressure values. OPERATION To set the unit of measure in which molbox RFM displays pressure values, press [SETUP] and select <2presU>. Pressure unit type: The display is:...
Page 84: 4Molbloc
(see Section 3.1.3). PRINCIPLE molbox RFM continuously monitors the rate of change of flow through the molbloc to which it is connected and compares this rate to the stability limit to make a Ready/Not Ready determination (see Section 3.1.3). The STABILITY function allows the stability limit to be adjusted by the user to increase or decrease the stability required for a Ready (<*>) condition to occur.
Page 85: 6Adj
3.5.6 <6ADJ> PURPOSE To apply adder (FA) and multiplier (FM) coefficients to the flow measured by molbox RFM. PRINCIPLE The ADJ function gives the user the capability to adjust mass flow readings made by molbox RFM. This is accomplished by setting an adder and a multiplier.
Page 86: Special]
(See section 3.6.2). [SPECIAL] PURPOSE The [SPECIAL] key accesses a menu of molbox RFM functions and settings that are less commonly or not normally used in regular operation. These functions include: <1reset> Access and execute various reset options (see Section 3.6.1).
Page 87: 1Reset
Reset clears settings that the user may have made, and should be used only to restore the molbox RFM to a known state. molbox RFM will go through its reboot routine after any type of reset is executed.
Page 88: 1Sets
(see Section 3.4.3.4). • Pressure unit of measure to kPa (see Section 3.5.2). • User pressure unit coefficient to 1.00/Pa (see Section 3.5.2). • Temperature unit of measure to °C (see Section 3.5.3). © 1998-2007 DH Instruments, a Fluke Company Page 78...
Page 89: 3Com
3.6.1.3 <3COM> OPERATION/PURPOSE To access Reset - Com, press [SPECIAL] and select <1reset>, <3com>. Reset - Com clears and sets to default the molbox RFM communications ports (see Section 3.6.6). This includes: • COM1 and COM2 Baud rate: 2 400...
Page 90: 2Level
PRINCIPLE molbox RFM’s front panel user interface provides the means to access all molbox RFM u s e r d e f i n e d d a t a , s e t t i n g s a n d f u n c t i o n s i n c l u d i n g c a l i b r a t i o n d a t a .
Page 91: Table 16. Security Levels - Functions Not Executed Per Function/Level
[SPECIAL], <1reset>, <4cal> • • • [SPECIAL], <1reset>, <5all> • • [SPECIAL], <4cal> • • • [SPECIAL], <4cal>, <any 3edit> • [SPECIAL], <5prefs> • • [SPECIAL], <5prefs>, <1ScrSvr> [SPECIAL], <5prefs>, <2sound> • • Page 81 © 1998-2007 DH Instruments, a Fluke Company...
Page 92: Table 17. Security Levels - Functions Not Executed Per Function/Level (Continued)
• OPERATION molbox RFM is delivered with NO active password so access to the User Level menu is open. The user level is set to <1Low>. User levels can be changed freely until a password has been created. RESET functions (see Section 3.6.1) do not affect the password setting.
Page 93: 3Ul
<1change user level 2edit password> screen. The first field, <nnnn>, is the serial number of the molbox RFM, followed by a second field, <xx>, that counts the number of times that a secondary password has been used. The second field increments each time a secondary password is used.
Page 94: Upper Limit Alarm And Sequence
Other menus can be observed but the MAIN run screen can not be accessed and no molbox RFM internal valves can be operated. To return the molbox RFM to normal operation, it must be turned OFF and back ON or press [ENTER] from the overpressure screen.
Page 95: 1Scrsvr
PRINCIPLE molbox RFM provides audible feedback by a brief “beep” when a valid key press is made. Invalid key presses are indicated by a descending two tone “blurp”. The frequency of this valid key press beep may be selected from three choices or all keypress sounds may be suppressed.
Page 96: 3Time
DATE function to set your local time and date. 3.6.5.4 <4ID> PURPOSE To view or edit the molbox RFM user ID and to view the molbox RFM serial number. PRINCIPLE molbox RFM has a factory programmed serial number that is included on the product label on the bottom of the case and can be viewed in the introductory screen.
Page 97: 5Log
COM1 sends a message to COM2. COM2 sends a message to COM1. In each step, molbox RFM checks the message received at the receiving COM port. If the receiving COM port times out or receives an incorrect message, that step of the test fails.
Page 98: Com1 And Com2
The IEEE-488 port address can be defined from 1 to 31. The default address is 10. The molbox RFM sends a line feed (<LF>) and asserts the EOI line at the end of all transmitted messages. It looks for a line feed and/or assertion of the EOI line to terminate incoming messages (see Section 4.2.2).
Page 99: 7Micro
MICRO function (see Section 3.4.7). PRINCIPLE The molbox RFM microrange option (if present) improves molbox RFM flow measurements below 10 % FS of the measurement range. See Section 1.2.4.1.1 for a complete description of microrange principles. The differences between automatic microrange and manual microrange...
Page 100: 8Head
In this case, it is useful to make a head correction to the pressure measured by the molbox RFM in order to predict the pressure actually applied at a different height.
Page 101: 9Bpr
PRINCIPLE When molbloc-S elements are used with molbox RFM, the RPT which is normally used to read molbloc downstream pressure, may be pneumatically connected to either the molbloc-S nozzle’s upstream or downstream pressure, by molbox RFM internal valving. The two RPTs are used to simultaneously measure upstream pressure when possible to minimize the uncertainty on molbloc-S upstream pressure measurement by averaging the two RPT readings.
Page 102: Figure 11. Molbox Rfm Internal Pneumatic Schematic - Molbloc-S Operation, Bpr On
RPTs upstream. As an alternate to operator switching between BPR ON and BPR OFF, molbox RFM has a BPR mode called AUTO that uses on-board logic to determine when to turn BPR ON and OFF. In BPR AUTO mode, the molbox uses cues based on flow and pressure changes, stability, and proximity to the Reynolds number-based BPR limits to determine when to switch between the BPR ON and BPR OFF valve states.
Page 103 (calculated from empirical testing of molbloc-S choking ratios, see Section 3.1.2), then, once the flow is stable within 0.5 % of reading for 3 seconds, molbox RFM switches to BPR OFF valve state and begins live averaging of the two RPT pressure values.
Page 104 In Auto mode, when the valves are in BPR OFF state, flow is calculated from the average of the two RPT pressure readings as in BPR OFF mode. When the molbox RFM valves switch to the BPR ON valve state in Auto mode, the tare can no longer be dynamically calculated because the two RPTs are not measuring the same pressure.
Page 105: Overview
Sending a command to the molbox RFM will place it into remote mode. The remote indicator in the lower right hand corner of the molbox RFM front panel will light when the molbox RFM is in remote mode. It will also flicker when a command is received.
Page 106: Rs232 Interface
RS232 INTERFACE To establish RS232 communications a standard “pin to pin” DB-9F to DB-9M RS232 cable must be used to connect the host COM port to molbox RFM COM1. The interface settings of both ports must be the same. molbox RFM supports an independent RS232 self-test to verify that the molbox RFM RS232 ports are operating correctly and the interface cable being used is valid.
Page 107: Ieee-488 (Gpib)
4.3.1 COMMAND SYNTAX All molbox RFM commands are ASCII strings. The user must wait for the molbox RFM to reply before sending another command. An exception to this is the use of any of the IEEE STD. 488.2 Common Commands via the IEEE-488 interface (these common commands are shown first, and always start with an asterisk, “*”).
Page 108: Command Summary
Read or set the molbox RFM ID. Read or set the “K” factor. KFACT(=) Start a molbox RFM or system leak check cycle or check if a cycle is complete. LEAKCK(=) Enable the front panel controls if in remote and go to local.
Page 109: Error Messages
4.3.3 ERROR MESSAGES The molbox RFM will always reply to a command. If the command is incorrect or contains invalid data, an error number will be returned in the form “ERR# n” where n is an integer number that represents a specific error.
Page 110: Table 22. Error Messages
RFM™ OPERATION AND MAINTENANCE MANUAL Table 22. Error Messages REPLY DESCRIPTION ERROR “The molbox RFM is in high security level and cannot accept remote commands” ERR# 0 “OK” ERR# 1 “molbloc flow is too great” ERR# 2 “Text argument is too long”...
Page 111: Command Descriptions
4.3.4.1 IEEE STD. 488.2 COMMON AND STATUS COMMANDS The molbox RFM supports a set of commands that are common to all instruments conforming to IEEE Std. 488.2 protocol. Though defined by the IEEE-488.2 standard, they also apply to molbox RFM RS232 (COM1) communications. These commands make it easy to perform basic functions for any device that supports them.
Page 112 Syntax “∗OPC” “∗OPC?” Remarks This command enables the molbox RFM to set the OPC bit in the standard event status register when it has completed all pending functions. The query replies with a “1” when all functions are complete. Since the molbox RFM does not support overlapping commands, this command has no practical use.
Page 113 Resets the molbox RFM settings to factory settings. Syntax “∗RST” Remarks This command sets the molbox RFM settings to factory settings which is equivalent to pressing [SPECIAL] on the front panel and selecting <5Reset>, 1sets. This does not affect the communications settings.
Page 114: Molbox Rfm Commands
(as if the “∗RST” program message was executed), and the ∗TST query returns a ‘1’. If the molbox RFM passed the test on power up OR if the ∗TST query was used at least once since the unit was powered up the reply is ‘0’.
Page 115 Syntax “ABORT” Remarks This command should be used to ensure that molbox RFM is in a known state. The tare, purge, and leak check cycles put the RFM into a condition where it is not usable for normal flow measurement, so the “ABORT” command should be used before general operation of the unit begins if the previous state of the unit is not known.
Page 116 Remarks The next available measurements are replied. This can take up to 1 second, since the molbox RFM waits for the next flow measurement before replying. The reply starts with the flow ready information. Then the flow value is given in the current flow units.
Page 117 The number of stop bits. This may be ‘1’ or ‘2’. Defaults “COM1=2400,E,7,1” “COM2=2400,E,7,1” Remarks The COM1 port is used to communicate to the molbox RFM. When the COM1 port configuration of the molbox RFM is changed, the command reply will be sent at the old COM1 settings, subsequent...
Page 118 RPT. The pressure returned by this command is the differential pressure value that is being used by molbox RFM to calculate flow. Depending on the microrange setting, this can be the tare adjusted difference between the 2 absolute RPTs, the tare adjusted microrange RPT, or a combination of the two.
Page 119 It is dependent on the current flow unit and the gas selected. To use this coefficient, multiply it by kg/s to get flow in the current flow units. Example Command: “FCOEF” Reply: “4.798073e+004” See Also 3.2.2. and 7.1.3 Page 109 © 1998-2007 DH Instruments, a Fluke Company...
Page 120 Syntax “FR” Remarks The next available flow value is read in the current flow units. This can take up to 1 second, since the molbox RFM waits for the next flow measurement before replying. The reply also contains ready information.
Page 121 The flow unit used to display the measured flow. Remarks The flow unit displayed can be changed using this command. The flow unit must be supported by the molbox RFM. The flow unit protocol is the same as the front panel flow unit definitions. Example Command: “FUNIT=SLM”...
Page 122 Remarks The user defined ID label can be used to allow the user to “tag” the molbox RFM with a unique identifier. This ID is stored in non-volatile memory and cannot be erased by a power failure, system fault or reset.
Page 123 4. REMOTE OPERATION LEAKCK(=) Purpose Starts a molbox RFM or system leak check cycle or checks if a cycle is complete. Syntax “LEAKCK=type(,microrange)” “LEAKCK” Arguments type: “BOX” starts a leak check cycle on the molbox internal circuit. molbox must prepared for the leak check by setting pressures and venting ports before the leak check is executed.
Page 124 Remarks The AUTOMATIC and MANUAL MICRORANGE functions control the way that the microrange option is used in the molbox RFM. The command in it’s query form can also be used to tell if the microrange option is installed in a molbox RFM.
Page 125 The external molbloc header data includes the serial number, range, calibration date, and PRT calibration data. This data is stored in the molbloc, and is downloaded to the molbox RFM on power up. The data for the active molbloc is returned in a single,...
Page 126 PRTs. Example Command: “OHMS” Reply: “107.075 Ohms, 107.079 Ohms” Errors ERR# 42: There is an error in the molbox RFM PRT measurement. See Also 3.2.5, “TEMP”, “STDRES” PCAL(=) Purpose Read or set the user RPT calibration adjustments (PA, PM). Syntax “PCAL=upadder, upmult, dnadder, dnmult, ( mradder, mrmult)”...
Page 127 “SR” command. The pressure measurement number starts at the fifth character, and is followed by the pressure unit of measure. Example Command: “PR” Reply: “R 247.598 kPaa” See Also 3.1.2.4, “READYCK”, “SR”, “PRDP”, “PRHI”, “PRLO” Page 117 © 1998-2007 DH Instruments, a Fluke Company...
Page 128 “PRLO” Remarks The current downstream pressure value (corrected for tare) is returned in the current pressure unit of measure. Example Command: “PRLO” Reply: “224.67 kPaa” See Also “DP”, “PRDP”, “PR”, “PRHI” © 1998-2007 DH Instruments, a Fluke Company Page 118...
Page 129 Do not assume the usable range is equal to the range designation. Example Command: “RANGE” Reply: “10.00 sccm” See Also 1.2.4.3 and 1.2.4.4, “MOLBLOC”, “DEVICE=EXT” Page 119 © 1998-2007 DH Instruments, a Fluke Company...
Page 130 "READYCK=1" command when the molbox RFM is in a Not Ready (NR) condition, the reply will be "READYCK=0". If you set READYCK=1 when the molbox RFM achieves a Ready (R) condition, you can use READYCK later to determine if a Not Ready (NR) condition has occurred.
Page 131 Read the serial number of the molbox RFM. Syntax “SN” Remarks Each molbox RFM is serialized. This serial number is also imprinted on the product label on the bottom of the molbox RFM and is displayed in the power up introductory screen. Example Command: “SN” Reply: “SN”...
Page 132 Reynolds number of 1 200 allowed for a valid measurement. A “b” will appear if the molbox RFM is busy with a tare, leak check or purge cycle which does not allow normal operation.
Page 133 Syntax “TARE” Remarks The user should set the molbox RFM valves to the tare condition (see “TARESETUP”) and check the tare conditions before taring the internal transducers (see “TARESET”). The returned data will allow the user to determine if the current conditions will allow a valid tare.
Page 134 RFM™ OPERATION AND MAINTENANCE MANUAL TARESETUP(=) Purpose To prepare the molbox RFM to be tared and to return the unit to normal operation after a tare has been completed. Syntax “TARESETUP=mode “TARESETUP” Defaults “TARESETUP=OFF” Arguments mode: “OFF” Allows normal operation of the molbox RFM.
Page 135 999 to 999 Pa). Remarks “TARESET” will automatically tare the molbox RFM only if the tare results are within the limits given (see the “TARE” command). Use the “TARESETUP” command to prepare the unit to be tared, and the “TARE” command to check if conditions are valid.
Page 136 Remarks The temperature unit is used for reporting the molbloc temperature, and for setting various other temperature settings. Example Command: “TUNIT” Reply: “C” Errors ERR# 6: The unit argument is invalid. © 1998-2007 DH Instruments, a Fluke Company Page 126...
Page 137 Remarks This temperature reference is used by the user defined units. Example Command: “UTEMP=20” Reply: “20.00 C” See Also 3.2.3, 3.2.3.2, and 3.2.3.3, “FUNIT”, “TUNIT” Page 127 © 1998-2007 DH Instruments, a Fluke Company...
Page 138 RFM™ OPERATION AND MAINTENANCE MANUAL Purpose Read the molbox RFM version. Syntax “VER” Remarks The software version of the molbox RFM can be read. This is useful for checking for the presence of the molbox RFM and for reference purposes. Example Command: “VER”...
Page 139: Status System
The status system includes the status reporting system which reports general molbox RFM events. The user can select which molbox RFM events will cause a status change event. These events are then reported to the status system (bit7 and bit3 of the status byte register), which also must be configured for the STATus subsystem to generate the service requests described in Section 4.4.1.
Page 140: Figure 13. Status Byte Register
Indicates that the SRQ line of the IEEE-488 interface has been asserted by the molbox RFM. This bit is cleared when a serial poll is performed on the molbox RFM, and is a part of the status byte register when read using a serial poll.
Page 141: Standard Event Register
4.4.1.2 STANDARD EVENT REGISTER The molbox RFM contains an 8 bit Standard event register that reflects specific molbox RFM events that are not RPT dependent. Enabled events in this register will set or clear the ESB bit of the status byte register.
Page 143: Product Overview
For rapid assistance in specific situations and other troubleshooting information, see Section 6. molbox RFM is covered by a limited one year warranty. Unauthorized service or repair during the warranty period is undertaken at the owner's risk and may cause damage that is NOT covered under product warranty and/or may void the product warranty.
Page 144: Calibration Of Reference Pressure Transducers (Rpts)
• One to measure molbloc downstream pressure If molbox RFM is equipped with the microrange option (see Section 3.1.5), it also has a third low differential RPT. To calibrate an RPT, pressures from a pressure standard are applied to the RPT at ascending and descending pressure points over the RPT range.
Page 145: Pa And Pm Coefficients
For information on preventing access to calibration information, see Section 3.6.2. A new molbox RFM is delivered with user PA and PM values set to zero (0) and one (1) respectively for all RPTs. This does NOT mean that the molbox RFM has NOT been calibrated.
Page 146: Differential (Microrange) Rpt
• Accuracy of ± 2 Pa (0.0003 psi) or better, if best molbox RFM accuracy is to be obtained. A lower accuracy standard may be used but molbox RFM accuracy may be degraded from published specifications proportionally.
Page 147: Viewing And Editing Rpt Readings And Calibration Information
For information on preventing access to calibration information see Section 3.6.2. PURPOSE To read the output of molbox RFM RPTs in calibration mode; view and edit the calibration coefficients and calibration date. PRINCIPLE The molbox RFM CAL function contains all of the functions needed to perform RPT calibrations in one menu area.
Page 148: Viewing Rpt Outputs
<4cal>, <1pressure>. Select RPT: 1upstrm The display is: 2dnstrm 3micro The <3micro> option is not present if the molbox RFM does not have the microrange option (see Section 3.1.5). Select the desired RPT and then select <1run>. Selecting <3micro> causes a warning message to appear concerning possible overpressure of the microrange RPT.
Page 149: Figure 14. Molbox Rfm Internal Pneumatic Schematic - Run Upstream Or Downstream
Internal Pneumatic Schematic – RUN UPSTREAM OR DOWNSTREAM ABSOLUTE RPT CALIBRATION 1. High Isolation: Open 2. Low Isolation: Open 3. Bypass: Closed Mirorange Bypass: Closed Figure 15. molbox RFM Internal Pneumatic Schematic – RUN MICRORANGE DIFFERENTIAL RPT CALIBRATION Page 139 © 1998-2007 DH Instruments, a Fluke Company...
Page 150: Viewing And Editing Rpt Pa, Pm And Calibration Date
To view or edit PA and PM calibration coefficients (see Section 5.2.1.1) and the calibration date for each Reference Pressure Transducer (RPT). Capability to view and edit the values of the reference resistors used by molbox RFM’s ohmic measurement system (see Section 5.3) is also provided here. This capability is normally used only by a DHI Authorized Service Provider.
Page 151: Rpt Calibration/Adjustment Procedure Without Using Caltool For Rpts Software
(see Section 5.2.4.1). Apply the calibration pressures (generally 20 % increments ascending and descending) for the RPT(s) recording the pressure applied by the standard and the molbox RFM RPT(s) reading(s) at each calibration point. The standard calibration range for the upstream and downstream absolute RPTs is 70 to 550 kPa absolute (10 to 80 psia).
Page 152: Ohmic Measurement System Verification
RFM reads the correct corresponding temperature when that resistance is connected. Reference resistors mounted in a molbloc simulator for easy connection to molbox RFM using the normal molbloc connection cable can be purchased from your DHI Sales Representative (molbloc simulator, 107 Ω, P/N 401232).
Page 153: Reloading Embedded Software Into Molbox Rfm Flash Memory
OPERATION To verify the molbox RFM ohmic measurement system proceed as follows: Connect a molbloc simulator P/N 401232 to the molbox RFM and initialize it as if connecting a molbloc (see Section 2.3.3). Press [P&T] and then [+/-] to display the molbox RFM temperature measurement.
Page 154: Reloading Molbloc Eeprom File
Check that top cover mounted cooling fan operates when molbox RFM is powered. To open the molbox RFM case, remove the pop-off screw covers on the top of the case. Then remove the four case screws. Lift OFF the cover taking care NOT to damage the electrical leads that connect the molbox RFM main board to the cover mounted cooling fan.
Page 155: Internal View
6. Power supply 7. Micro board 8. Main board (not visible, under micro board and power supply) 9. Cooling fan (not visible, mounted on top cover) Figure 16. molbox RFM Internal View Page 145 © 1998-2007 DH Instruments, a Fluke Company...
Page 156: Upstream Absolute Rpt
UP (HI) and DOWN (LO) rear panel ports and bypass the two ports together. If molbox RFM is equipped with the microrange option, a fourth (3-way) solenoid valve puts the microrange differential RPT into and out of service (bypassed or not bypassed).
Page 157: Main Board
COM ports for reading RPTs. 5.6.1.9 COOLING FAN The cooling fan is mounted to the molbox RFM top cover and connected to the main board. It is a 5 V brushless DC fan, max. air flow 0.13 m3m (4.6 cfm). Page 147...
Page 159: T R O U B L E S H O O T I N
Before assuming that unexpected behavior is caused by a system defect or breakdown, the operator should use this manual and other training facilities to become thoroughly familiar with molbox RFM operation. This troubleshooting guide is intended as an aid in identifying the cause of unexpected molbox RFM behavior and determining whether the behavior is due to normal operation or an internal or external problem.
Page 160 BPR below the BPR limit at the current Reynolds numbers. 3.1.2, 1.2.4.2.1. Pressure indicated by molbox RFM never There is a leak in the molbox RFM Find and correct leak. Consider using becomes stable. and/or in the system to which it molbox RFM LEAK CHECK functions.
Page 161 Turn on microrange option. (3.4.7) the low end of the range. microrange but the option is not Flow indication appears to be incorrect by molbox RFM needs to be correctly Tare molbox RFM. Be sure to tare a constant offset amount.
Page 162 RPTs; check value. defective; RPT calibration is bad; calibration of RPTs; leak check molbox there is a leak inside molbox RFM RFM. (5.2 and 3.2.4.3.1) causing a differential pressure. Leak check does not indicate pass/fail in Improper expectation for Normal molbox RFM operation. molbloc-S molbloc-S operation.
Page 163 (3.5.2) Apparent inaccurate pressure or flow Reference pressure transducer Check and correct calibration coefficients if measurement. (RPT) calibration coefficients have needed. (5.2) been altered or lost and pressure measurements are incorrect. Page 153 © 1998-2007 DH Instruments, a Fluke Company...
Page 165: Conversion Of Numerical Values
7. APPENDIX CONVERSION OF NUMERICAL VALUES molbox RFM performs all internal calculations in SI units. Numerical values input or output in other units are converted to SI immediately after entry and back to other units just before output as needed.
Page 166: Flow
Table 29. Conversions From sccm At 0 °C To Other Volumetrically Based Flow Units TO CONVERT FROM SCCM AT 0 °C TO OTHER VOLUMETRICALLY BASED UNITS MULTIPLY BY 1.0 E-03 6.0 E-02 scfm 3.53147 E-05 scfh 2.11888 E-03 sm3m 1.0 E-04 sm3h 6.0 E-05 © 1998-2007 DH Instruments, a Fluke Company Page 156...
Page 167: Table 30. Conversions From Volumetrically Based Flow Units At 0 °C To Corresponding Units At Another Temperature (Uxxx)
4.96032 E+02 Methane (CH 6.23325 E+01 Nitrogen (N 3.56939 E+01 Nitrus Oxide (N 2.27206 E+01 Oxygen (O 3.12512 E+01 Propane (C 2.26778 E+01 Sulfur Hexafluoride (SF 6.84697 E+00 Xenon (Xe) 7.61615 E+00 Page 157 © 1998-2007 DH Instruments, a Fluke Company...
Page 168: Table 32. Conversion From Mole/S To Pccm
Where: = 27315 Puser = user pressure [kPa θ ° user temperatur 101.325 = gas dependent compressibility factors θ Puser T © 1998-2007 DH Instruments, a Fluke Company Page 158...
Page 169: Warranty Statement
7. APPENDIX WARRANTY STATEMENT Except to the extent limited or otherwise provided herein, DH Instruments, a Fluke Company (DHI) warrants for one year from purchase, each new product sold by it or one of its authorized distributors, only against defects in workmanship and/or materials under normal service and use. Products which have been changed or altered in any manner from their original design, or which are improperly or defectively installed, serviced or used are not covered by this warranty.
Page 171 K Factor DUT. Microrange An optional molbox RFM feature which improves flow measurement resolution and accuracy under 10 % of FS of the molbloc. Includes a low differential RPT and valve to put the RPT into and out of service.
Page 172 User Level Level of security that can be set to prevent access to certain molbox RFM functions. Volumetrically based mass flow units of measure with a user set reference temperature.

Fluke MOLBOX RFM Operation And Maintenance Manual

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1 I N T R O D U C T I on

1000 M a I N T E N a N C E , a D J U S T M E N T S a N D C a L I B R a T I O

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3 O P E R a T I O

4 Remote Operation

6 T R O U B L E S H O O T I N

7 A P P E N D I

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